Light irradiation apparatus
AssigneeDisco Corporation
InventorNobuyuki Kimura
Life of this patent
Estimating the term…
Abstract
A light irradiation apparatus that splits white light into light rays of a plurality of wavelengths to apply the light ray includes a white light source, a diffraction grating that splits white light emitted by the white light source into light rays of a plurality of wavelengths, and a light selector that selects a light ray of a specified wavelength from the light rays of the plurality of wavelengths split by the diffraction grating.
Claims6
A light irradiation apparatus that splits white light into light rays of a plurality of wavelengths to apply the light ray, the light irradiation apparatus comprising:
- a white light source;
- a diffraction grating that splits white light emitted from the white light source into light rays of a plurality of wavelengths;
- and
- a light selector that selects a light ray of a specified wavelength from the light rays of the plurality of wavelengths split by the diffraction grating;
- wherein the light selector selects a light ray of a specified wavelength from the light rays of the plurality of wavelengths split by the diffraction grating by a pinhole mask;
- wherein the light selector includes:
- a first focusing mirror that reflects the light rays of the plurality of wavelengths split by the diffraction grating,
- a second concave focusing mirror that is disposed at a position of point symmetry with the first focusing mirror with a focal point of the first focusing mirror as a center of symmetry,
- an optical path conversion mirror that changes an optical path positioned at the focal point of the second focusing mirror, and
- the pinhole mask that selects a light ray of a specified wavelength from the light rays of the plurality of wavelengths of which the optical paths are converted by the optical path conversion mirror;
- and
- wherein the light selector further includes a third focusing mirror disposed between the optical path conversion mirror and the pinhole mask, and a focal point of the third focusing mirror is positioned at the pinhole mask.
A light irradiation apparatus that splits white light into light rays of a plurality of wavelengths to apply the light ray, the light irradiation apparatus comprising:
- a white light source;
- a diffraction grating that splits white light emitted from the white light source into light rays of a plurality of wavelengths;
- and
- a light selector that selects a light ray of a specified wavelength from the light rays of the plurality of wavelengths split by the diffraction grating;
- wherein the light selector includes:
- a first focusing mirror that receives the light rays from the diffraction grating and reflects the light rays of the plurality of wavelengths split by the diffraction grating,
- a second concave focusing mirror that receives the light rays from the first focusing mirror, wherein the second focusing mirror is disposed at a position of point symmetry with the first focusing mirror with a focal point of the first focusing mirror as a center of symmetry,
- an optical path conversion mirror that receives the light rays from the second focusing mirror, the optical conversion mirror being positioned at the focal point of the second focusing mirror, the optical conversion mirror being variable positioned so as to change an optical path of light rays reflected by the optical conversion mirror, and
- a pinhole mask that receives the light rays from the optical conversion mirror and selects a light ray of a specified wavelength from the light rays of the plurality of wavelengths of which the optical paths are converted by the optical path conversion mirror.
Dependencies are inferred from the claim text.