Microscopic image capturing method and microscopic image capturing device
AssigneeHitachi High-Tech Corporation
InventorsAkira Masuya, Tadao Yabuhara
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AssigneeHitachi High-Tech Corporation
InventorsAkira Masuya, Tadao Yabuhara
Estimating the term…
A microscopic image capturing method includes: emitting a light beam from a light beam light source; detecting a spot image by a camera or a photodiode; focusing the spot image by an objective lens actuator moving an objective lens in the optical axis direction of the light beam with respect to a sample container; determining by a reflective surface identification unit whether the light beam has been applied to a defect on the basis of the spot image; when it is determined that the light beam has been applied to the defect, moving by an XY stage the sample container with respect to the objective lens in a direction orthogonal to the optical axis of the light beam in accordance with a prescribed condition; and, when the light beam has not been applied to the defect, capturing a microscopic image of a sample by using an illuminator.
A microscopic image capturing method for capturing microscopic image using a microscopic image capturing device, wherein
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