Noise monitoring apparatus, noise monitoring system and a noise monitoring method

A noise monitoring system, comprising:

• a device-under-test (DUT) array, comprising a plurality of rows of DUTs, each of the plurality of rows comprises a plurality of DUTs;
• and
• a noise monitoring apparatus, comprising:
• a row selection circuit, selecting a row of the DUT array to be a selected row during a readout period, wherein the selected row comprises a plurality of selected DUTs
• a direct current (DC) cancellation circuit, coupled to unselected DUTs of the DUT array during the readout period, generating a DC current signal based on bias current signals from a group of unselected DUTs corresponding to a selected DUT among the plurality of selected DUTs, and subtracting the DC current signal from a first noise signal of the selected DUT to generate a second noise signal;
• and
• an amplifier circuit, coupled to the plurality of selected DUTs of the selected row during the readout period, amplifying the second noise signal from each of the selected DUTs to generate an output signal.

A noise monitoring method of a noise monitoring apparatus, the noise monitoring apparatus comprises a row selection circuit, a direct current (DC) cancellation circuit and an amplifier circuit, the noise monitoring method comprising:

• selecting, by the row selection circuit, a row of a DUT array to be a selected row during a readout period, wherein the selected row comprises a plurality of selected DUTs;
• generating, by the DC cancellation circuit being coupled to unselected DUTs of the DUT array during the readout period, a DC current signal based on bias current signals from a group of unselected DUTs corresponding to a selected DUT among the plurality of selected DUTs;
• subtracting, by the DC cancellation circuit, the DC current signal from a first noise signal of the selected DUT to generate a second noise signal;
• and
• amplifying, by the amplifier circuit being coupled to the plurality of selected DUTs of the selected row during the readout period, the second noise signal from each of the selected DUTs to generate an output signal.