Design-assisted large field of view metrology
AssigneeKLA Corporation
InventorsStefan Eyring, Frank Laske
Life of this patent
Estimating the term…
Abstract
A metrology system may receive design data including a layout of fabricated instances of a structure on a sample. The system may further receive detection signals from the metrology tool associated within a field of view including multiple of the fabricated instances of the structure. The system may further generate design-assisted composite data for the structure by combining detection signals from one or more common features of the structure associated with the fabricated instances of the structure within the field of view using the design data. The system may further generate one or more metrology measurements of the structure based on the design-assisted composite data.
Claims41
A metrology system comprising:
- a controller configured to be communicatively coupled to a metrology tool, the controller including one or more processors configured to execute program instructions causing the one or more processors to:
- receive design data including a layout of fabricated instances of a structure on a sample;
- receive detection signals from the metrology tool associated within a field of view including a plurality of the fabricated instances of the structure;
- generate design-assisted composite data for the structure by combining detection signals from one or more common features of the structure associated with the plurality of fabricated instances of the structure within the field of view using the design data;
- and
- generate one or more metrology measurements of the structure based on the design-assisted composite data.
A metrology system comprising:
- a metrology tool;
- a controller communicatively coupled to a metrology tool, the controller including one or more processors configured to execute program instructions causing the one or more processors to:
- receive design data including a layout of a plurality of fabricated instances of a structure on a sample;
- receive detection signals from a metrology tool associated within a field of view including a plurality of the fabricated instances of the structure;
- generate design-assisted composite data for the structure by combining detection signals from one or more common features of the structure associated with the plurality of fabricated instances of the structure within the field of view using the design data;
- and
- generate one or more metrology measurements of the structure based on the design-assisted composite data.
A metrology method comprising:
- receiving design data including a layout of fabricated instances of a structure on a sample;
- generating detection signals from a metrology tool associated within a field of view including a plurality of the fabricated instances of the structure;
- generating design-assisted composite data for the structure by combining detection signals from one or more common features of the structure associated with the plurality of fabricated instances of the structure within the field of view using the design data;
- and
- generating one or more metrology measurements of the structure based on the design-assisted composite data.
Dependencies are inferred from the claim text.