Method for manufacturing hard carbon-based coating, and member provided with coating
AssigneesSumitomo Electric Industries, Ltd., Mitsubishi Materials Corporation, D.N.A. Metal Company, Limited
InventorsYoshiki Nishibayashi, Shigeki Maeda, Kazutaka Fujiwara
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Abstract
Provided is a method for manufacturing a hard carbon-based coating. The method includes: a step A of preparing a film-forming apparatus including a power supply device and a discharge electrode containing a carbon material, and a substrate having a surface on which a coating is to be formed; and a step B of causing the film-forming apparatus to repeatedly generate a discharge between the discharge electrode and the substrate, to form a hard carbon-based coating on the surface.
Claims3
A method for manufacturing a hard carbon-based coating, the method comprising:
- a step A of preparing a film-forming apparatus including a power supply device and a discharge electrode containing a carbon material, and a substrate having a surface on which a coating is to be formed;
- a step B of causing the film-forming apparatus to repeatedly generate a discharge between the discharge electrode and the substrate, to form the hard carbon-based coating consisting of an electrode material of the discharge electrode on the surface,
- wherein the discharge electrode is vibrated to generate a periodic discharge;
- the power supply device is an AC power source;
- and
- an AC voltage applied to the discharge electrode is greater than or equal to 7.5 kV at a frequency of 50 Hz to 60 Hz, the discharge electrode being vibrated at 30 Hz to 90 Hz, and the discharge electrode being rubbed against the surface of the substrate to cause the discharge electrode to scan the surface of the substate.
Dependencies are inferred from the claim text.