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US 12,080,514 B2Granted
Arbitrary electron dose waveforms for electron microscopy
AssigneeIntegrated Dynamic Electron Solutions, Inc.
InventorsRuth Shewmon Bloom, Bryan Walter Reed, Daniel Joseph Masiel, Sang Tae Park
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Abstract
A device may include an electron source, a detector, and a deflector. The electron source may be directed toward a sample area. The detector may receive an electron signal or an electron-induced signal. A deflector may be positioned between the electron source and the sample. The deflector may modulate an intensity of the electron source directed to the sample area according to an electron dose waveform having a continuously variable temporal profile.
Claims21
A device comprising:
- a pattern generator configured to produce an electrical signal representative of an electron dose waveform;
- and
- driver electronics configured to receive the electrical signal from the pattern generator and supply a voltage having a temporal profile representative of the electron dose waveform;
- and
- one or more computer processors that are individually or collectively programmed to:
- (a) receive an indication of the electron dose waveform,
- (b) adjust a shape of the electron dose waveform according to one or more parameters,
- (c) update the indication of the electron dose waveform based on the one or more tunable parameters, and
- (d) deliver the indication to the pattern generator.
6 more elements
Dependencies are inferred from the claim text.