Template, workpiece, and alignment method

A workpiece processed by an imprint process using a template, the workpiece comprising:

• an alignment mark for alignment with the template,
• wherein the alignment mark includes a second main pattern in which a fourth part and a fifth part are disposed in at least a first direction as a predetermined repeating pattern and a second auxiliary pattern in which the fourth part and the fifth part are configured as a pattern opposite to the repeating pattern in a region outside an end of the second main pattern in a second direction intersecting the first direction,
• the second auxiliary pattern includes a sixth part in a region corresponding to the fifth part, and
• in the second direction of the alignment mark, a phase of noise at the end of the fourth part of the second main pattern and a phase of noise at the end of the sixth part of the second auxiliary pattern are reversed by 180°.

An alignment method comprising:

• setting a template on which an alignment mark is formed and a workpiece on which an alignment mark is formed so that the template and the workpiece face each other;
• emitting inspection light from a side of the template;
• acquiring moire information related to a moire generated by irradiation with the inspection light;
• and
• adjusting a relative position of the template and the workpiece based on the moire information,
• wherein the alignment mark of the template includes a first main pattern in which a first part and a second part are disposed in at least a first direction as a predetermined first repeating pattern and a first auxiliary pattern in which the first part and the second part are configured as a pattern opposite to the first repeating pattern in a region outside an end of the first main pattern in a second direction intersecting the first direction,
• the first auxiliary pattern includes a third part in a region corresponding to the second part,
• in the second direction of the alignment mark of the template, a phase of noise at the end of the first part of the first main pattern and a phase of noise at the end of the third part of the first auxiliary pattern are reversed by 180°,
• the alignment mark of the workpiece includes a second main pattern in which a fourth part and a fifth part are disposed in at least the [MY1] first direction as a predetermined second repeating pattern and a second auxiliary pattern in which the fourth part and the fifth part are configured as a pattern opposite to the second repeating pattern in a region outside an end of the second main pattern, in the [MY2] second direction intersecting the first direction,
• the second auxiliary pattern includes a sixth part in a region corresponding to the fifth part, and
• in the second direction of the alignment mark of the workpiece, a phase of noise at the end of the fourth part of the second main pattern and a phase of noise at the end of the sixth part of the second auxiliary pattern are reversed by 180°.