Radiation analysis system, charged particle beam system, and radiation analysis method

A radiation analysis method comprising:

• detecting a radiation by a superconductive transition edge sensor;
• detecting a current flowing through the superconductive transition edge sensor by a current detection mechanism;
• processing a detection signal of the current from the current detection mechanism;
• calculating a baseline current of the current by a computer system;
• calculating, by the computer system, a peak value of a signal pulse generated in the detection signal when the superconductive transition edge sensor detects the radiation;
• acquiring, by the computer system, correlation data based on the baseline current and the peak value when a radiation having at least a first energy is detected by the superconductive transition edge sensor under two or more different temperature conditions, and
• correcting, by the computer system, the peak value of the signal pulse or an energy value calculated from the peak value on the basis of the baseline current before the signal pulse is generated when a radiation having unknown energy is detected by the superconductive transition edge sensor and the correlation data.

A radiation analysis system comprising:

• a superconductive transition edge sensor that detects a radiation;
• a current detection mechanism that detects a current flowing through the superconductive transition edge sensor;
• and
• a computer subsystem that processes a detection signal of the current from the current detection mechanism,
• wherein the computer subsystem comprises a storage device that stores therein correlation data based on a baseline current and a peak value when a radiation having at least a first energy is detected by the superconductive transition edge sensor under two or more different temperature conditions, and
• wherein the computer subsystem performs
• a process of calculating a baseline current of the detection signal of the current,
• a process of calculating a peak value of a signal pulse generated in the detection signal when the superconductive transition edge sensor detects the radiation, and
• a process of correcting the peak value of the signal pulse or an energy value calculated from the peak value on the basis of the baseline current before the signal pulse is generated when a radiation having unknown energy is detected by the superconductive transition edge sensor and the correlation data.

A radiation analysis system comprising:

• a superconductive transition edge sensor that detects a radiation;
• a current detection mechanism that detects a current flowing through the superconductive transition edge sensor;
• and
• a computer subsystem that processes a detection signal of the current from the current detection mechanism,
• wherein the computer subsystem performs
• a process of calculating a baseline current of the detection signal of the current,
• a process of calculating a peak value of a signal pulse generated in the detection signal when the superconductive transition edge sensor detects the radiation,
• a process of acquiring correlation data based on the baseline current and the peak value, and
• a process of calculating, if the baseline current before the signal pulse is generated when a radiation having unknown energy is detected by the superconductive transition edge sensor exceeds a threshold, an average value of the baseline currents from before a first point to a second point before a point that exceeds the threshold, and correcting the peak value of the signal pulse or an energy value calculated from the peak value on the basis of the average value of the baseline currents and the correlation data.