Method of detecting failure of antiparallel thyristor, and power control device
AssigneeTokyo Electron Limited
InventorTakashi Ogino
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AssigneeTokyo Electron Limited
InventorTakashi Ogino
Estimating the term…
A method of detecting a failure of an antiparallel thyristor, wherein the antiparallel thyristor includes a first thyristor and a second thyristor connected in parallel and in opposite directions, and is configured to control power supplied from an alternating current power supply to a load, the method including: detecting, as a first detection value, a voltage or a current supplied to the load when ceasing an output command for the second thyristor and issuing an output command for the first thyristor; detecting, as a second detection value, the voltage or the current supplied to the load when ceasing the output command for the first thyristor and issuing the output command for the second thyristor; and determining the failure of the antiparallel thyristor based on a difference between the first detection value and the second detection value.
A method of detecting a failure of an antiparallel thyristor, wherein the antiparallel thyristor includes a first thyristor and a second thyristor connected in parallel and in opposite directions, and is configured to control power supplied from an alternating current power supply to a load, the method comprising:
A power control device comprising:
Dependencies are inferred from the claim text.