Pressure measurement device

A system, comprising:

• a pressure measurement device couplable to a gas cavity of a device under test (DUT), the pressure measurement device including:
• a port configured to be in fluid communication with the gas cavity of the DUT;
• a pressure control module fluidly coupled to the port to adjust a gas pressure in the gas cavity, wherein the pressure control module includes a gas pump configured to provide pressurized gas to the gas cavity;
• and
• a gas discharging port fluidly coupled to the port and the pressure control module, wherein the gas discharging port is configured to discharge gas from the port or the pressure control module;
• a pressure measurement module connection port fluidly coupled to the port, the pressure control module, and the gas discharging port;
• a first proportional valve and a first isolation valve coupled between the pressure control module and the port;
• and
• a second proportional valve and a second isolation valve coupled between the gas discharging port and the port;
• and
• a pressure measurement module detachably coupled to the pressure measurement module connection port, wherein the pressure measurement module is configured to measure gas pressure at the port,
• wherein the first proportional valve and the first isolation valve are configured to open to allow gas to flow between the gas cavity and the pressure control module when the pressure control module adjusts the gas pressure in the gas cavity, and
• wherein the second proportional valve and second isolation valve are configured to open in cooperation with the first proportional valve so as to enable gas to be discharged from the port through the gas discharging port when the pressure measurement module indicates that the gas pressure at the port is greater than a pressure threshold.

A pressure measurement device, comprising:

• a port couplable in fluid communication with a gas cavity of a device under test;
• a pressure control module fluidly coupled to the port to adjust a gas pressure in the gas cavity, wherein the pressure control module comprises a gas pump configured to provide pressurized gas to the gas cavity;
• a gas discharging port fluidly coupled to the port and the pressure control module, wherein the gas discharging port is configured to discharge gas from the port or the pressure control module when a gas pressure at the port exceeds a pressure threshold;
• and
• a pressure measurement module configured to measure gas pressure at the port, wherein the pressure measurement module is detachably coupled to the pressure measurement device;
• wherein the gas pump is a multi-stage electric gas pump including:
• a driving mechanism;
• an eccentric shaft including a main body having a longitudinal axis, a first eccentric portion, and a second eccentric portion, wherein the first eccentric portion and the second eccentric portion are fixed on the main body, the eccentric shaft is driven by the driving mechanism to produce a first circular movement of the first eccentric portion around the longitudinal axis and a second circular movement of the second eccentric portion around the longitudinal axis, and the second circular movement is synchronized with the first circular movement;
• a first cylinder including a first piston rod and a first chamber, the first piston rod being connected to the first eccentric portion and configured to reciprocate in response to the first circular movement of the first eccentric portion so as to periodically pressurize gas drawn into the first chamber from outside the multi-stage electric gas pump and discharge first pressurized gas out of the first chamber;
• a second cylinder in fluid communication with the first cylinder, the second cylinder including a second piston rod and a second chamber, the second piston rod being connected to the first eccentric portion and configured to reciprocate in response to the first circular movement of the first eccentric portion so as to periodically pressurize the first pressurized gas drawn into the second chamber from the first chamber of the first cylinder and then discharge second pressurized gas out of the second chamber;
• and
• a third cylinder in fluid communication with the second cylinder, the third cylinder including a third piston rod and a third chamber, the third piston rod being connected to the second eccentric portion and configured to reciprocate in response to the second circular movement of the second eccentric portion so as to periodically pressurize the second pressurized gas drawn into the third chamber from the second chamber of the second cylinder and then discharge third pressurized gas out of the third chamber.