Measurement apparatus, control apparatus, and control method

A measurement apparatus comprising:

• a sensor, including any one of an interferometer sensor, a laser range finder, or a confocal chromatic sensor, that measures a workpiece;
• an imaging device that generates captured image data by capturing the workpiece;
• a multi-axis robot that moves the sensor and the imaging device in a three-dimensional space;
• and
• a controller, including at least a processor, configured to:
• determine a plurality of measurement positions that are positions along a normal direction at each of a plurality of positions to be measured of the workpiece and a direction of the sensor at each of the plurality of measurement positions on the basis of at least captured image data indicating the geometry of the workpiece,
• sequentially move the sensor to the plurality of measurement positions by controlling the robot, and
• output measured data indicating a result that is measured by the sensor at each of the plurality of measurement positions in association with the plurality of positions to be measured,
• repeat moving the imaging device to one imaging position among a plurality of imaging positions where one position to be measured corresponding to one measurement position among the plurality of positions to be measured can be captured by controlling the multi-axis robot before moving the sensor to the one measurement position,
• determine a position of the sensor relative to the workpiece such that the direction of the optical axis of the sensor matches normal directions of the plurality of positions to be measured by identifying the normal directions at the plurality of positions to be measured corresponding to the plurality of imaging positions on the basis of a plurality pieces of captured image data generated by the imaging device at the plurality of imaging positions, and
• control actuators of the multi-axis robot so that the direction of the sensor becomes the determined direction at each of the plurality of positions to be measured.