Flexible fuel system for combustion abatement
AssigneeGlobalFoundries U.S. Inc.
InventorJustin M. Weinstein
Life of this patent
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Abstract
A system to abate an emission from a first semiconductor process is disclosed. The system includes an abatement apparatus, such as a gas scrubber, to remove hazardous and toxic gas species from the emission. The abatement apparatus may combust the emission to remove these gas species using a fuel and oxidant. The system includes a fuel assembly fluidly coupled to the abatement apparatus which transmits the fuel from at least one source through the abatement apparatus. The fuel assembly may include a supply tank which contains a volume of fuel, a recovery apparatus which recovers and contains a recovery volume of fuel from a second semiconductor process, and a mass flow controller which may transmit fuel from at least one of the supply tank and the recovery apparatus through the abatement apparatus.
Claims14
A system comprising:
- an abatement apparatus including a combustion chamber configured to abate an emission output from a first semiconductor process;
- and
- a flexible fuel assembly coupled to the abatement apparatus and configured to transmit fuel through the combustion chamber which catalyzes a combustion reaction to abate the emission therein, wherein the flexible fuel assembly comprises:
- a first fuel source having a first fuel contained therein,
- a first mass flow controller (MFC) fluidly coupled between the first fuel source and the abatement apparatus,
- a second fuel source having a second fuel contained therein,
- a second MFC fluidly coupled between the second fuel source and the abatement apparatus, wherein the flexible fuel assembly is configured to transmit at least one of the first fuel and the second fuel through the abatement apparatus, and
- an oxidant assembly fluidly coupled to the abatement apparatus and configured to transmit an oxidant through the combustion chamber, wherein the oxidant catalyzes the combustion reaction with at least one of the first fuel and the second fuel in the combustion chamber.
A flexible fuel assembly comprising:
- a first fuel source having a first fuel contained therein;
- a first mass flow controller (MFC) fluidly coupled to the first fuel source and configured to transmit the first fuel from the first fuel source through an abatement apparatus;
- a second fuel source having a second fuel contained therein;
- a second MFC fluidly coupled to the second fuel source and configured to transmit the second fuel from the second fuel source through the abatement apparatus;
- and
- an oxidant assembly fluidly coupled to the abatement apparatus and configured to transmit an oxidant through a combustion chamber of the abatement apparatus;
- wherein the oxidant and at least one of the first fuel and the second fuel catalyzes a combustion reaction within the combustion chamber of the abatement apparatus to abate an emission output from a first semiconductor process.
Dependencies are inferred from the claim text.