Substrate dimension adapter

An adapter for retaining a substrate on a support of an equipment, the substrate having a substrate dimension not compatible with the support, the adapter having a front side to receive the substrate and a back side opposite the front side, the adapter back side being configured to be placed on, and to extend over, a main face of the support, the main face of the support comprising a first suction channel and a second suction channel, the adapter comprising:

• at least one shallow recess disposed on the front side to receive a substrate, the shallow recess being shaped to the substrate dimension and having a flat base to contact a surface of the substrate;
• and
• a vacuum network extending through the adapter and comprising at least one through-passage connecting the adapter back side and the adapter front side, the through-passage opening out, on the front side, in the shallow recess and intercepting, on the back side, the first suction channel of the support, the vacuum network being configured to not intercept the second suction channel of the support, the adapter back side being arranged to face the second suction channel.