Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for producing composite sintered body
AssigneeSumitomo Osaka Cement Co., Ltd.
InventorsNobuhiro Hidaka, Naoto Kimura
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Abstract
A composite sintered body is a ceramic composite sintered body which includes metal oxide which is a main phase, and silicon carbide which is a sub-phase, in which crystal grains of the silicon carbide are dispersed in crystal grains of the metal oxide and at crystal grain boundaries of the metal oxide, and a proportion of the crystal grains of the silicon carbide dispersed in the crystal grains of the metal oxide is 25% or more in an area ratio with respect to a total crystal grains of the silicon carbide.
Claims14
A composite sintered body which is a ceramic composite sintered body, comprising:
- a metal oxide which is a main phase;
- and
- silicon carbide which is a sub-phase,
- wherein crystal grains of the silicon carbide are dispersed in crystal grains of the metal oxide and at crystal grain boundaries of the metal oxide, and
- a proportion of the crystal grains of the silicon carbide dispersed in the crystal grains of the metal oxide is 25% or more in an area ratio with respect to a total crystal grains of the silicon carbide.
A method for producing a composite sintered body, comprising:
- a step of mixing metal oxide particles and silicon carbide particles;
- a step of adjusting pH of slurry obtained in the mixing step to a range in which surface charges of the metal oxide particles in the slurry become positive and surface charges of the silicon carbide particles in the slurry become negative;
- a step of forming a formed body after a dispersion medium is removed from the slurry with adjusted pH;
- and
- a step of pressure-sintering the obtained formed body by heating the formed body to a temperature of 1600° C. or higher while compacting the formed body with a pressure of 25 MPa or more under a non-oxidative atmosphere.
Dependencies are inferred from the claim text.