Wet bench structure
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChung-Yu Lin, Shih-Chi Kuo, Chun-Chieh Mo
Life of this patent
Estimating the term…
Abstract
The present disclosure describes an apparatus for processing one or more objects. The apparatus includes a carrier configured to hold the one or more objects, a tank filled with a processing agent and configured to receive the carrier, and a spinning portion configured to contact the one or more objects and to spin the one or more objects to disturb a flow field of the processing agent.
Claims20
An apparatus for processing a plurality of objects, comprising:
- a carrier configured to hold the plurality of objects, wherein the carrier comprises one or more lifting portions;
- a tank configured to hold a processing agent and to receive the carrier;
- and
- a first sub-roller attached to a first frame and a second sub-roller attached to a second frame positioned over the plurality of objects and configured to simultaneously spin the plurality of objects to disturb a flow field of the processing agent, wherein:
- the first sub-roller is configured to spin a first object of the plurality of objects at a first speed, and
- the second sub-roller is configured to spin a second object of the plurality of objects at a second speed different from the first speed;
- and
- a control device programmed to simultaneously rotate the first sub-roller at the first speed and the second sub-roller at the second speed.
An apparatus for processing a plurality of objects, comprising:
- a carrier configured to hold the plurality of objects, wherein a first frame and a second frame are positioned over the carrier;
- a tank configured to hold a processing agent and receive the carrier;
- a first sub-roller attached to the first frame and a second sub-roller attached to the second frame, the first sub-roller and the second sub-roller, configured to contact the plurality of objects and simultaneously spin the plurality of objects to disturb a flow field of the processing agent wherein:
- the first sub-roller is configured to spin a first object of the plurality of objects at a first speed, and
- the second sub-roller is configured to spin a second object of the plurality of objects at a second speed different from the first speed;
- and
- a control device programmed to simultaneously rotate the first sub-roller at the first speed and the second sub-roller at the second speed.
A system for reducing contamination on a plurality of objects, comprising:
- a carrier configured to hold the plurality of objects, wherein the carrier comprises one or more lifting portions, and wherein a first frame and a second frame are positioned over the plurality of objects;
- a tank configured to hold a processing agent and to receive the carrier;
- a first sub-roller attached to the first frame and a second sub-roller attached to the second frame, wherein the first sub-roller is configured to spin a first object of the plurality of objects at a first speed, and wherein the second sub-roller is configured to simultaneously spin a second object of the plurality of objects at a second speed different from the first speed;
- a control device programmed to simultaneously rotate the first sub-roller at the first speed and the second sub-roller at the second speed;
- and
- a communication interface configured to transmit a control signal from the control device to the first sub-roller and the second sub-roller.
Dependencies are inferred from the claim text.