Resist underlayer film-forming composition including cyclic carbonyl compound
AssigneeNissan Chemical Corporation
InventorsHikaru Tokunaga, Hiroto Ogata, Keisuke Hashimoto, Makoto Nakajima
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AssigneeNissan Chemical Corporation
InventorsHikaru Tokunaga, Hiroto Ogata, Keisuke Hashimoto, Makoto Nakajima
Estimating the term…
A resist underlayer film-forming composition formed into a flat film which can exhibit high etching resistance, a good dry etching velocity ratio and a good optical constant, has a good covering property even against a so-called step-structure substrate, and has a small film thickness difference after being embedded. Also, a method for producing a polymer suitable for the resist underlayer film-forming composition; a resist underlayer film using the resist underlayer film-forming composition; and a method for manufacturing a semiconductor device. A resist underlayer film-forming composition containing a reaction product of an aromatic compound having 6 to 60 carbon atoms with a carbonyl group in a cyclic carbonyl compound having 3 to 60 carbon atoms and a solvent, wherein the reaction product has such a structure that one of the carbon atoms in the cyclic carbonyl compound links two molecules of the aromatic compound to each other.
A resist underlayer film-forming composition comprising a solvent and a reaction product between a C6-C60 aromatic compound and a carbonyl group of a C3-C60 cyclic carbonyl compound,
A resist underlayer film-forming composition comprising a solvent and a reaction product between a C6-C60 aromatic compound and a carbonyl group of a C3-C60 cyclic carbonyl compound,
A method for producing a polymer for use in a resist underlayer film-forming composition, comprising the step of reacting a C6-C60 aromatic compound with a carbonyl group of a C3-C60 cyclic carbonyl compound,
Dependencies are inferred from the claim text.