Mechanically driven SMR-BASED MEMS magnetoelectric antennas

A method of fabricating a solidly mounted resonator (SMR)-based magnetoelectric (ME) antenna, comprising:

• providing a silicon substrate;
• depositing a Bragg reflector on the silicon substrate;
• depositing at least one bottom electrode on the Bragg reflector;
• depositing a ZnO film on the bottom electrode and the Bragg reflector;
• depositing a top electrode on the ZnO film;
• and
• depositing a FeGaB/SiO2 multilayer on the top electrode and the ZnO film.

A transceiver system comprising:

• solidly mounted resonator (SMR)-based magnetoelectric (ME) antenna, comprising:
• a substrate;
• a Bragg reflector disposed on the substrate;
• a magnetostrictive/piezoelectric ME composite element disposed on the Bragg reflector;
• a first electrically conductive contact disposed between the Bragg reflector and the magnetostrictive/piezoelectric ME composite element, electrically coupled to a bottom surface of the magnetostrictive/piezoelectric ME composite element;
• and
• a second electrically conductive contact disposed on top of the magnetostrictive/piezoelectric ME composite element and electrically coupled to the top of the magnetostrictive/piezoelectric ME composite element;
• an impedance matcher coupled to the first electrically conductive contact and the second electrically conductive contact;
• a transceiver having one or both of a receiver component and a transmitter component;
• and
• a transmission line having (i) a first end electrically coupled to the impedance matcher and (ii) a second end electrically coupled to the transceiver.