Suspension for a mems vibration sensor

A suspension for a microelectromechanical systems (MEMS) vibration sensor, comprising:

• a first anchor assembly and a second anchor assembly, wherein each anchor assembly comprises:
• an anchor body and a spring integrally extending from the anchor body;
• wherein each spring comprises:
• a first section integrally extending from the anchor body, the first section including a first end proximate to the anchor body and a second end distal from the anchor body;
• a second section and a third section, each of the second and third sections including a first lateral portion extending from the second end of the first section, a first leg that extends from the first lateral portion toward the anchor body, the first leg including a first end proximate to the first lateral portion and a second end distal from the first lateral portion, a second lateral portion that extends from the second end of the first leg away from the first section, and a second leg that extends from the second lateral portion away from the anchor body, the second leg including a first end proximate to the second lateral portion and a first end distal from the second lateral portion,
• wherein the first lateral portions of the second and third sections extend in opposite lateral directions, and
• wherein second ends of the second legs extend farther from the anchor body than the first lateral portions;
• and
• wherein the second ends of the second legs are configured to integrally connect a single proof mass connected between the first and second anchor assemblies, wherein the plurality of anchor assemblies are connected along a connection axis with each first section extending along the connection axis toward the first section of one of the each of the one or more springs.

A suspension for a vibration sensor, comprising:

• a first anchor assembly, a second anchor assembly, and a third anchor assembly,
• wherein each anchor assembly comprises:
• an anchor body and at least one spring integrally extending from the anchor body;
• wherein each spring comprises:
• a first section integrally extending from the anchor body, the first section including a first end proximate to the anchor body and a second end distal from the anchor body;
• a second section and a third section, each of the second and third sections including a first lateral portion extending from the second end of the first section, a first leg that extends from the first lateral portion toward the anchor body, the first leg including a first end proximate to the first lateral portion and a second end distal from the first lateral portion, a second lateral portion that extends from the second end of the first leg away from the first section, and a second leg that extends from the second lateral portion away from the anchor body, the second leg including a first end proximate to the second lateral portion and a second end distal from the second lateral portion,
• wherein the first lateral portions of the second and third sections extend in opposite lateral directions, and
• wherein second ends of the second legs extend farther from the anchor body than the first lateral portions;
• wherein a first anchor assembly includes a first anchor body integrally connected between first and second springs, a second anchor assembly includes a second anchor body integrally connected to a third spring, and a third anchor assembly includes a third anchor body integrally connected to a fourth spring;
• wherein the first, second, and third anchor assemblies are arranged along a support axis with the first anchor assembly disposed between the second and third anchor assemblies with the first spring facing the third spring and with the second spring facing the fourth spring;
• wherein the second and third sections of the first, second, third, and fourth springs each further comprise a third lateral portion that extends from the second end of the second leg away from the first section;
• wherein the third lateral portions of the third spring are configured to integrally connect to a first proof mass on a first side of the support axis and to a first support plate on an opposite second side of the support axis, the third lateral portions of the fourth spring are configured to integrally connect to a second proof mass on the second side of the support axis and to a second support plate on the first side of the support axis;
• and
• wherein the third lateral portions of the first spring are configured to integrally connect to the first proof mass on the first side of the support axis and to the first support plate on the second side of the support axis, and the third lateral portions of the second spring are configured to integrally connect to the second proof mass on the second side of the support axis and to the second support plate on the first side of the support axis.