Microstructure and method of producing a microstructure

A microstructure for use in a microelectromechanical device comprising a substrate having a top surface and a rear surface and a thin-film structure arranged at the top surface of the substrate, the thin-film structure comprising:

• a raised portion spaced from the substrate wherein the raised portion of the thin-film structure is a movable part of the microstructure,
• a lower portion of the thin-film structure, which is in mechanical contact with the substrate,
• at least one protruding portion being hollow and having at least one sidewall and a bottom part and the protruding portion mechanically connecting the raised portion to the substrate via the bottom part, wherein the at least one protruding portion forms a hollow profile enclosing a volume and being open at its top side, the top side facing away from the substrate, and
• at least one further sidewall of the thin-film structure at a distance to the at least one protruding portion, wherein the further sidewall mechanically connects the lower portion with the raised portion of the thin-film structure.