Micromechanical structure and method of providing the same

A micromechanical structure comprising:

• a first micromechanical element;
• a second micromechanical element;
• a torsion spring arrangement comprising a first torsion spring element, comprising a first center line, mechanically connected to the first micromechanical element at a first contact region and to the second micromechanical element at a second contact region, and comprising a second torsion spring element, comprising a second center line, mechanically connected to the first micromechanical element at a third contact region and to the second micromechanical element at a fourth contact region in or der to connect the first micromechanical element and the second micromechanical element to be movable relative to each other;
• wherein a distance between the first center line and the second center line, starting from the first and third contact regions towards the second and fourth contact regions, decreases in a first portion and increases in a second portion;
• wherein, in a rest position of the micromechanical structure, the first torsion spring element and the second torsion spring element are arranged without contact to each other;
• wherein the distance between the center lines comprises a minimum in a region of center line centers and increases starting from the center line centers towards the first micromechanical element and towards the second micromechanical element;
• and the torsion spring elements are formed to be straight in sections and are arranged in accordance with an X shape, wherein the torsion spring elements are arranged without contact to each other.

A method of providing a micromechanical structure, comprising:

• providing a first micromechanical element;
• providing a second micromechanical element;
• arranging a torsion spring arrangement comprising a first torsion spring element, comprising a first center line, so that it is mechanically connected to the first micromechanical element at a first contact region and to the second micromechanical element at a second contact region, and comprising a second torsion spring element, comprising a second center line, so that it is mechanically connected to the first micromechanical element at a third contact region and to the second micromechanical element at a fourth contact region in order to connect the first micromechanical element and the second micromechanical element to be movable relative to each other;
• such that a distance between the first center line and the second center line, starting from the first and third contact regions towards the second and fourth contact regions, decreases in a first portion and increases in a second portion;
• and
• such that, in a rest position of the micromechanical structure, the first torsion spring element and the second torsion spring element are arranged without contact to each other;
• such that the first center line comprises a first center and the second center line comprises a second center;
• such that the first center line, on a first side starting from the first center, extends in a quarter ellipse path towards the first contact region and, on a second side opposite the first side, in a quarter ellipse path towards the second contact region;
• and
• such that the second center line, on a first side starting from the second center, extends in a quarter ellipse path towards the third contact region and, on a second side opposite the first side, in a quarter ellipse path towards the fourth contact region;
• such that the center lines of the torsion spring elements extend along axial extension directions of the torsion spring elements, such that the extension directions are variable in a plane of the micromechanical structure, such that a cross-section of the first torsion spring element and of the second torsion spring element increases linearly or non-linearly perpendicularly to the axial extension direction and starting from the center line centers of the center line;
• or decreases linearly or non-linearly.

A method of providing a micromechanical structure, comprising:

• providing a first micromechanical element;
• providing a second micromechanical element;
• arranging a torsion spring arrangement comprising a first torsion spring element, comprising a first center line, so that it is mechanically connected to the first micromechanical element at a first contact region and to the second micromechanical element at a second contact region, and comprising a second torsion spring element, comprising a second center line, so that it is mechanically connected to the first micromechanical element at a third contact region and to the second micromechanical element at a fourth contact region in order to connect the first micromechanical element and the second micromechanical element to be movable relative to each other;
• such that a distance between the first center line and the second center line, starting from the first and third contact regions towards the second and fourth contact regions, decreases in a first portion and increases in a second portion;
• and
• such that, in a rest position of the micromechanical structure, the first torsion spring element and the second torsion spring element are arranged without contact to each other;
• such that the distance between the center lines comprises a minimum in a region of center line centers and increases starting from the center line centers towards the first micromechanical element and towards the second micromechanical element;
• and the torsion spring elements are formed to be straight in sections and are arranged in accordance with an X shape such that the torsion spring elements are arranged without contact to each other.