Optical waveguide device and laser apparatus including the same

A laser apparatus comprising:

• an active device disposed on one side of a substrate to generate laser light;
• an optical waveguide device disposed on another side of the substrate to tune a peak wavelength of the laser light;
• and
• a phase controller disposed on the substrate between the active device and the optical waveguide device to control a phase of the laser light,
• wherein the optical waveguide device comprises:
• a peripheral part disposed on an edge region of the substrate;
• an air pocket disposed on a central region of the substrate within the peripheral part;
• an optical waveguide comprising a core layer, which is disposed on an upper portion of the substrate within the air pocket to extend in a first direction, and an electrode on the core layer;
• and
• a plurality of fingers configured to adjust a temperature of the optical waveguide, disposed in the air pocket to connect the optical waveguide to the peripheral part in a second direction crossing the first direction,
• wherein the plurality of fingers comprises edge fingers and center fingers between the edge fingers,
• wherein the edge fingers are located at a first distance from a closest one, respectively, of the center fingers,
• wherein the center fingers are separated from each other by a second distance that is less than the first distance, and
• wherein each of the center fingers is thicker than each of the edge fingers.

A laser apparatus comprising:

• a substrate having a distributed Bragg reflector (DBR) section, a phase section, and a gain section;
• a lower clad layer disposed on the substrate;
• an air pocket disposed between the substrate and the lower clad layer in the DBR section;
• a core layer disposed on the lower clad layer to extend in a first direction;
• an upper clad layer disposed on the core layer and the lower clad layer outside the core layer;
• a protective layer on the upper clad layer in the DBR section and the phase section;
• electrodes aligned with the core layer and disposed on the protective layer in the DBR section and the phase section and on the upper clad layer in the gain section;
• and
• a plurality of fingers configured to adjust a temperature of the optical waveguide, disposed in the air pocket and separated from each other in the first direction,
• wherein the plurality of fingers comprise edge fingers disposed at an edge in the DBR section, and center fingers disposed at a center in the DBR section between the edge fingers,
• wherein each of the center fingers is thicker than each of the edge fingers.