Narrowed-line gas laser apparatus and method for manufacturing electronic devices
AssigneeGigaphoton Inc.
InventorYosuke Fujimaki
Life of this patent
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Abstract
A narrowed-line gas laser apparatus includes a laser chamber that accommodates a pair of electrodes disposed so as to face each other, an output coupling mirror, and a line narrowing apparatus that forms an optical resonator along with the output coupling mirror, the line narrowing apparatus including an optical system having a first region and a second region on which a first portion and a second portion of a light beam that exits out of the laser chamber are incident, the first and second portions passing through different positions in a direction in which the pair of electrodes face each other, the optical system being configured to suppress an increase in the distance between the optical path axis of the first portion and the optical path axis of the second portion.
Claims20
A narrowed-line gas laser apparatus comprising:
- a laser chamber accommodating a pair of electrodes disposed so as to face each other;
- an output coupling mirror;
- and
- a line narrowing apparatus forming an optical resonator along with the output coupling mirror, the line narrowing apparatus including an optical system having a first region and a second region on which a first portion and a second portion of a light beam that exits out of the laser chamber are incident, the first and second portions passing through different positions in a direction in which the pair of electrodes face each other, the optical system being configured to suppress an increase in a distance between an optical path axis of the first portion and an optical path axis of the second portion.
A narrowed-line gas laser apparatus comprising:
- a laser chamber accommodating a pair of electrodes disposed so as to face each other;
- an output coupling mirror;
- and
- a line narrowing apparatus including a first grating and forming an optical resonator along with the output coupling mirror, the line narrowing apparatus including an optical system having a first region and a second region on which a first portion and a second portion of a light beam that exits out of the laser chamber are incident, the first and second portions passing through different positions in a direction of grooves of the first grating, the optical system being configured to suppress an increase in a distance between an optical path axis of the first portion and an optical path axis of the second portion.
A method for manufacturing electronic devices, the method comprising:
- causing a narrowed-line gas laser apparatus to produce pulsed laser light, the narrowed-line gas laser apparatus including
- a laser chamber accommodating a pair of electrodes disposed so as to face each other,
- an output coupling mirror, and
- a line narrowing apparatus forming an optical resonator along with the output coupling mirror, the line narrowing apparatus including an optical system having a first region and a second region on which a first portion and a second portion of a light beam that exits out of the laser chamber are incident, the first and second portions passing through different positions in a direction in which the pair of electrodes face each other, the optical system being configured to suppress an increase in a distance between an optical path axis of the first portion and an optical path axis of the second portion;
- outputting the pulsed laser light to an exposure apparatus;
- and
- exposing a light sensitive substrate with the pulsed laser light in the exposure apparatus to manufacture the electronic devices.
Dependencies are inferred from the claim text.