Encoder device and manufacturing method thereof, drive device, stage device, and robot device

A manufacturing method of an encoder device, the encoder device comprising:

• a position detection unit for detecting position information of a moving part;
• a magnet having a plurality of polarities along a moving direction of the moving part;
• an electric signal generation unit having a magnetosensitive part whose magnetic characteristic is changed by a change in magnetic field associated with movement of the moving part, an electric power generation part for generating an electric signal based on the magnetic characteristic of the magnetosensitive part, and a first magnetic body for guiding magnetic flux lines of the magnet toward the magnetosensitive part;
• and
• a second magnetic body for guiding magnetic flux lines of a part having one polarity of the magnet toward a part having other polarity of the magnet, the second magnetic body being disposed between the magnet and the magnetosensitive part,
• the manufacturing method comprising:
• preparing the magnetosensitive part, the electric power generation part, and the first magnetic body;
• inserting the electric power generation part into a first hole portion of an assembling jig and inserting the magnetosensitive part into a second hole portion provided in the first hole portion through the electric power generation part;
• fixing the electric power generation part and the magnetosensitive part each other;
• and
• fixing the electric power generation part taken out from the assembling jig to a housing disposed on a side surface of the second magnetic body.

A manufacturing method of an encoder device, the encoder device comprising:

• a position detection unit for detecting position information of a moving part;
• a magnet having a plurality of polarities along a moving direction of the moving part;
• an electric signal generation unit having a magnetosensitive part whose magnetic characteristic is changed by a change in magnetic field associated with movement of the moving part, an electric power generation part for generating an electric signal based on the magnetic characteristic of the magnetosensitive part, and a first magnetic body for guiding magnetic flux lines of the magnet toward the magnetosensitive part;
• and
• a second magnetic body for guiding magnetic flux lines of a part having one polarity of the magnet toward a part having other polarity of the magnet, the second magnetic body being disposed between the magnet and the magnetosensitive part,
• the manufacturing method comprising:
• preparing the magnetosensitive part, the electric power generation part, and the first magnetic body;
• fixing the electric power generation part to a housing disposed on a side surface of the second magnetic body;
• inserting the magnetosensitive part into the electric power generation part through an opening provided in the housing;
• and
• fixing the magnetosensitive part to the housing.