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US 12,065,359 B2Granted
Portable fluorine generator for on-site calibration
AssigneeApplied Materials, Inc.
InventorJoseph A. Van Gompel
Life of this patent
Estimating the term…
Abstract
A method and apparatus for generation of fluorine gas (F2) in situ at the point of use is provided. The portable fluorine generator includes a dilution system disposed within a housing and operable to mix a feed gas comprising fluorine with an inert gas. The portable fluorine generator further includes a plasma reactor unit disposed within the housing and operable to separate fluorine (F2) from the feed gas comprising fluorine.
Claims14
An apparatus for producing fluorine (F2) gas, comprising:
- a housing having an inlet operable to receive an inert gas;
- a source disposed within the housing, the source operable to supply a feed gas comprising fluorine;
- a dilution system disposed within the housing operable to mix the feed gas comprising fluorine with the inert gas, the dilution system disposed downstream of the inlet and the source;
- and
- a plasma reactor unit disposed within the housing and disposed downstream of the dilution system, the plasma reactor operable to generate fluorine (F2) gas from the feed gas comprising fluorine, the plasma reactor unit having:
- a first inlet channel operable to receive the feed gas comprising fluorine;
- and
- an outlet channel operable to deliver the fluorine (F2) gas.
5 more elements
A system for producing fluorine (F2) gas, comprising:
- a portable cart, comprising:
- a housing having an inlet operable to receive an inert gas;
- a source disposed within the housing, the source operable to supply a feed gas comprising fluorine;
- a dilution system disposed within the housing operable to mix the feed gas comprising fluorine with the inert gas, the dilution system disposed downstream of the inlet and the source;
- and
- a plasma reactor unit disposed within the housing and disposed downstream of the dilution system, the plasma reactor operable to generate fluorine (F2) gas from the feed gas comprising fluorine, the plasma reactor unit having:
- a first inlet channel operable to receive the feed gas comprising fluorine;
- and
- an outlet channel operable to deliver the fluorine (F2) gas.
6 more elements
Dependencies are inferred from the claim text.