System configurations for fabrication of micro-LED displays

A LED display fabrication tool, comprising:

• a first dispensing chamber including a first dispensing support to hold a workpiece and a first inkjet printer to deliver a first color conversion precursor onto the workpiece;
• a first washing/drying chamber including a first washing support to hold the workpiece and a first washing assembly configured to remove uncured portions of the first color conversion precursor from the workpiece;
• a second dispensing chamber including a second dispensing support to hold the workpiece and a second inkjet printer to deliver a second color conversion precursor different from the first color conversion precursor onto the workpiece;
• a second washing/drying chamber including a second washing support to hold the workpiece and a second washing assembly configured to remove uncured portions of the second color conversion precursor from the workpiece, wherein each of the first dispensing chamber, first washing/drying chamber, second dispensing chamber and second washing/drying chamber are independently sealable;
• one or more curing stations to cure the first color conversion precursor on the workpiece to form a first color conversion layer over a first plurality of LEDs on the workpiece and to cure the second color conversion precursor to form a second color conversion layer over a second plurality of LEDs on the workpiece;
• a workpiece transport system;
• and
• a controller configured to cause the workpiece transport system to move the workpiece sequentially through the first dispensing chamber, the first washing/drying chamber, the second dispensing chamber, and the second washing/drying chamber,
• wherein the LED display fabrication tool includes a plurality of process chambers and a central transfer chamber, wherein the plurality of process chambers includes the first dispensing chamber, first washing/drying chamber, second dispensing chamber, and second washing/drying chamber, wherein each process chamber is coupled to the central transfer chamber by a respective sealable port.

A LED display fabrication tool, comprising:

• a first dispensing chamber including a first dispensing support to hold a workpiece and a first inkjet printer to deliver a first color conversion precursor onto the workpiece;
• a first washing/drying chamber including a first washing support to hold the workpiece and a first washing assembly configured to remove uncured portions of the first color conversion precursor from the workpiece;
• a second dispensing chamber including a second dispensing support to hold the workpiece and a second inkjet printer to deliver a second color conversion precursor different from the first color conversion precursor onto the workpiece;
• a second washing/drying chamber including a second washing support to hold the workpiece and a second washing assembly configured to remove uncured portions of the second color conversion precursor from the workpiece, wherein each of the first dispensing chamber, first washing/drying chamber, second dispensing chamber and second washing/drying chamber are independently sealable;
• one or more curing stations to cure the first color conversion precursor on the workpiece to form a first color conversion layer over a first plurality of LEDs on the workpiece and to cure the second color conversion precursor to form a second color conversion layer over a second plurality of LEDs on the workpiece;
• a workpiece transport system;
• and
• a controller configured to cause the workpiece transport system to move the workpiece sequentially through the first dispensing chamber, the first washing/drying chamber, the second dispensing chamber, and the second washing/drying chamber,
• wherein the LED display fabrication tool includes a plurality of process chambers, a central transfer chamber, and a plurality of load lock chambers, wherein the plurality of process chambers includes the first dispensing chamber, first washing/drying chamber, second dispensing chamber, and second washing/drying chamber, wherein each load lock chamber is coupled to the central transfer chamber by a respective sealable port, wherein the first dispensing chamber and first washing/drying chamber are each coupled to a first load lock chamber of the plurality of load lock chambers by a respective sealable port, and wherein the second dispensing chamber and second washing/drying chamber are each coupled to a second first load lock chamber of the plurality of load lock chambers by a respective sealable port.

A LED display fabrication tool, comprising:

• a common dispensing chamber including a first dispensing support to hold a workpiece and a first inkjet printer to deliver a first color conversion precursor onto the workpiece and a second inkjet printer to deliver a second color conversion precursor different from the first color conversion precursor onto the workpiece;
• a first curing station to cure the first color conversion precursor on the workpiece to form a first color conversion layer over a first plurality of LEDs on the workpiece;
• a first washing/drying chamber including a first washing support to hold the workpiece and a first washing assembly configured to remove uncured portions of the first color conversion precursor from the workpiece;
• a second curing station to cure the second color conversion precursor to form a second color conversion layer over a second plurality of LEDs on the workpiece;
• a second washing/drying chamber including a second washing support to hold the workpiece and a second washing assembly configured to remove uncured portions of the second color conversion layer from the workpiece, wherein each of the first dispensing chamber, first washing/drying chamber, second dispensing chamber, and second washing/drying chamber are independently sealable;
• a workpiece transport system;
• and
• a controller configured to cause the workpiece transport system to move the workpiece sequentially through the common dispensing chamber, the first washing/drying chamber, the common dispensing chamber, and the second washing/drying chamber.