Method and system for adjustable coating using magnetron sputtering systems
AssigneeInterpane Entwicklungs-Und Beratungsgesellschaft Mbh & Co. KG
InventorDominik Wagner
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Abstract
A method and a system for adjustable coating on a substrate using a magnetron sputtering apparatus are provided. The method comprises the steps of providing a magnetron assembly which comprises a plurality of magnets attached to a plurality of yokes and a plurality of actuating mechanisms (208), each operatively coupled to at least one of the plurality of yokes. The method further comprises automatically determining individual positions of each of the plurality of yokes of the magnetron assembly on the basis of at least one parameter, and adjusting individually positions of each of the plurality of yokes of the magnetron assembly in accordance with the automatically determined individual positions.
Claims16
A method for coating a substrate using a magnetron sputtering apparatus which includes a magnetron assembly, the method comprising:
- automatically determining individual positions of each of a plurality of yokes of the magnetron assembly on the basis of at least one parameter;
- individually adjusting positions of each of the plurality of yokes of the magnetron assembly in accordance with the automatically determined individual positions;
- and
- providing signals, by a master controller within the magnetron assembly, to a plurality of slave controllers within the magnetron assembly, each slave controller being in operative communication with a corresponding driving module, wherein each driving module is configured to control the adjustment of a respective one of the plurality of yokes, via a respective actuating mechanism, in accordance with the signals from the master controller, and to send a confirmation signal back to the master controller after the adjustment of the respective one of the plurality of yokes.
A magnetron sputtering apparatus for coating a substrate, the magnetron sputtering apparatus comprising:
- a magnetron assembly, which comprises a plurality of magnets attached to a plurality of yokes, and a plurality of actuating mechanisms, each operatively coupled to at least one of the plurality of yokes;
- and
- a controller in operative communication with the magnetron sputtering apparatus and configured to automatically determine individual positions of each of the plurality of yokes on the basis of at least one parameter;
- wherein the actuating mechanisms are configured to individually adjust positions of each of the plurality of yokes in accordance with the automatically determined individual positions of each of the plurality of yokes, and
- wherein the magnetron assembly further comprises a master controller and a plurality of slave controllers, wherein the master controller is within the magnetron assembly and is configured to provide signals to the plurality of slave controllers, wherein each of the slave controllers is within the magnetron assembly and is in operative communication with a corresponding driving module, and wherein each driving module is configured to control the adjustment of a respective one of the plurality of yokes via a respective actuating mechanism in accordance with the signals from the master controller, and to send a confirmation signal back to the master controller after the adjustment of the respective one of the plurality of yokes.
Dependencies are inferred from the claim text.