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US 12,062,517 B2Granted
Slow-wave circuit, traveling wave tube, and method for manufacturing traveling wave tube
AssigneeNEC Network and Sensor Systems, Ltd.
InventorTakashi Nakano
Life of this patent
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Abstract
A slow-wave circuit comprises: a waveguide comprising a meander-shaped part that transmits an electromagnetic wave and alternately repeats a first folded part and a second folded part folded onto the opposite side to the first folded part; and a beam hole that transmits an electron beam, extends in a predetermined direction, and penetrates the meander-shaped part, wherein the beam hole penetrates the meander-shaped part so that a part of the beam hole protrudes from the first folded part.
Claims9
A slow-wave circuit, comprising:
- a waveguide comprising a meander-shaped part that transmits an electromagnetic wave and alternately repeats a first folded part and a second folded part, the second folded part being folded onto an opposite side to the first folded part;
- and
- a beam hole that transmits an electron beam, extends in a predetermined direction, and penetrates the meander-shaped part,
- wherein the beam hole penetrates the meander-shaped part so that a part of the beam hole protrudes from the first folded parts,
- wherein
- the first folded parts are folded along a first reference plane;
- the second folded parts are folded along a second reference plane spaced apart from the first reference plane;
- and
- the beam hole penetrates the meander-shaped part so that the part of the beam hole protrudes from the first reference plane.
6 more elements
A method for manufacturing a traveling wave tube, comprising:
- forming a first resist for forming a beam hole extending in a predetermined direction on a substrate (termed “step 1”);
- forming a second resist for forming a waveguide on the substrate including the first resist, the waveguide comprising a meander-shaped part, the meander-shaped part alternately repeats a first folded part and a second folded part, the second folded part being folded onto an opposite side to the first folded part, so that the first resist protrudes from a part corresponding to the first folded part in the second resist (termed “step 2”);
- forming a first structure body on the substrate including the first and second resists so that the first and second resists are completely buried (termed “step 3”);
- forming the first structure body comprising the beam hole and the waveguide by removing the substrate, the first resist and the second resist from the first structure body (termed “step 4”);
- forming a second structure body that is plane-symmetric with the first structure body by the same steps as the steps 1 to 4;
- and
- bonding the first and second structure bodies.
4 more elements
Dependencies are inferred from the claim text.