Photocurable composition comprising a fullerene
AssigneeCanon Kabushiki Kaisha
InventorsFen Wan, Weijun Liu
Life of this patent
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Abstract
A photocurable composition can comprise a polymerizable material, a fullerene or fullerene derivative in an amount of at least 0.2 wt % and not greater than 5.0 wt %, and a photoinitiator and may be adapted for AIP or NIL processing. A photo-cured layer made from the photocurable composition can have an improved thermal stability in comparison to a photo-cured layer made from the same photocurable composition except not containing a fullerene or fullerene derivative.
Claims20
A photocurable composition comprising a polymerizable material, a fullerene or fullerene derivative, and a photo-initiator, wherein
- an amount of the fullerene or fullerene derivative is at least 0.2 wt % and not greater than 5 wt % based the total weight of the photocurable composition;
- a viscosity of the photocurable composition is not greater than 60 mPa s;
- the polymerizable material comprises at least one multi-functional vinylbenzene in an amount of at least 45 wt % based on the total weight of the polymerizable material;
- and
- an amount of the polymerizable material is at least 90 wt % based on the total weight of the photocurable composition.
A method of forming a photo-cured layer on a substrate, comprising:
- applying a layer of a photocurable composition on the substrate, wherein the photocurable composition comprises a polymerizable material, a fullerene or fullerene derivative, and a photoinitiator, and wherein an amount of the fullerene or fullerene derivative is at least 0.2 wt % and not greater than 5 wt % based on the total weight of the photocurable composition;
- a viscosity of the photocurable composition is not greater than 60 mPa s;
- the polymerizable material comprises at least one multi-functional vinylbenzene in an amount of at least 45 wt % based on the total weight of the polymerizable material;
- and an amount of the polymerizable material is at least 90 wt % based on the total weight of the photocurable composition;
- bringing the photocurable composition into contact with a superstrate or an imprint template;
- irradiating the photocurable composition with light to form a photo-cured layer;
- and
- removing the superstrate or the imprint template from the photo-cured layer.
A method of manufacturing an article, comprising:
- applying a layer of a photocurable composition on a substrate, wherein the photocurable composition comprises a polymerizable material, a fullerene or fullerene derivative, and a photoinitiator, and wherein an amount of the fullerene or fullerene derivative is at least 0.2 wt % to not greater than 5 wt % based on the total weight of the photocurable composition;
- a viscosity of the photocurable composition is not greater than 60 mPa s;
- the polymerizable material comprises at least one multi-functional vinylbenzene in an amount of at least 45 wt % based on the total weight of the polymerizable material;
- and an amount of the polymerizable material is at least 90 wt % based on the total weight of the photocurable;
- bringing the photocurable composition into contact with a superstrate or an imprint template;
- irradiating the photocurable composition with light to form a photo-cured layer;
- removing the superstrate or the imprint template from the photo-cured layer;
- forming a pattern on the substrate;
- processing the substrate on which the pattern has been formed in the forming;
- and
- manufacturing an article from the substrate processed in the processing.
Dependencies are inferred from the claim text.