Electricity measuring type surface plasmon resonance sensor, electricity measuring type surface plasmon resonance sensor chip, method for detecting surface plasmon resonance changes

A method for detecting surface plasmon resonance changes using an electricity measuring type surface plasmon resonance sensor including:

• a plasmon resonance intensifying sensor chip in which a prism and a sensor chip are arranged, the sensor chip including an electrode, a silicon semiconductor film, and a plasmon resonance film electrode arranged in this order, wherein the prism, the electrode, the silicon semiconductor film, and the plasmon resonance film electrode are arranged in this order, and
• an electric measuring apparatus which directly measures a current or voltage from the electrode and the plasmon resonance film electrode, wherein the prism is configured to control an angle of an incident light so as to allow the incident light to totally reflect between the plasmon resonance film electrode and the silicon semiconductor film,
• the method for detecting surface plasmon resonance changes comprising:
• producing surface plasmon resonance by emitting light onto the prism and allowing the light, passing through the prism, the electrode, and the silicon semiconductor film, to totally reflect between the plasmon resonance film electrode and the silicon semiconductor film to interact with the plasmon resonance film electrode, and producing hot electrons by subjecting the light having passed through the prism and the electrode and the totally reflected light to light absorption in the silicon semiconductor film;
• picking up hot electrons produced by light absorption in the silicon semiconductor film, and hot electrons produced by the surface plasmon resonance and moved through the silicon semiconductor film, as an electric signal from the electrode;
• and
• measuring a change in current or voltage between the electrode and the plasmon resonance film electrode with the electric measuring apparatus.