Chalcogenosilacyclopentanes
AssigneeGelest, Inc.
InventorsBarry C. Arkles, Richard J. Liberatore, Youlin Pan
Life of this patent
Estimating the term…
Abstract
A new class of compounds known as chalcogenosilacyclopentanes is described. These compounds are five-membered ring structures containing a silicon-selenium or silicon-tellurium bond, as shown in Formulas (I) and (II). In these compounds, the substituents on the silicon and on the ring carbons may be hydrogen, alkyl, alkoxy, aromatic, or ether groups. The chalcogenosilacyclopentane compounds undergo ring-opening reactions with hydroxyl and other protic functionalities and may be used to prepare substrates that are amenable to thin film deposition techniques such as ALD and CVD.
Claims13
A chalcogenosilacyclopentane having formula (I), wherein Ra, Rb, Rc, Rd, Re, and Rf, are each independently selected from the group consisting of hydrogen, an alkyl group having one to about eight carbon atoms, an alkoxy group having one to about eight carbon atoms, an aromatic group, and an ether group, and wherein R and R′ are different and are each independently selected from the group consisting of hydrogen, an alkyl group having one to about eight carbon atoms, an alkoxy group having one to about eight carbon atoms, an aromatic group, and an ether group:
A chalcogenosilacyclopentane having formula (II), wherein Ra, Rb, Rc, Rd, Re, and Rf, are each independently selected from the group consisting of hydrogen, an alkyl group having one to about eight carbon atoms, an alkoxy group having one to about eight carbon atoms, an aromatic group, and an ether group, and wherein R and R′ are different and are each independently selected from the group consisting of hydrogen, an alkyl group having one to about eight carbon atoms, an alkoxy group having one to about eight carbon atoms, an aromatic group, and an ether group:
A chalcogenosilacyclopentane having formula (I), wherein Ra, Rb, Rc, Rd, Re, and Rf, are each independently selected from the group consisting of hydrogen, an alkyl group having one to about eight carbon atoms, an alkoxy group having one to about eight carbon atoms, an aromatic group, and an ether group, and wherein R and R′ are different and are each independently selected from the group consisting of hydrogen, an alkyl group having one to two carbon atoms, an alkoxy group having one to about eight carbon atoms, an aromatic group, and an ether group:
Dependencies are inferred from the claim text.