Variable capacitor comprised of first and second comb structures having first and second sets of switchably connected fingers, a reflection phase shifter, and a semiconductor device

A reflection-type phase shifter, comprising:

• a positive input port, a positive output port, a negative input port, a negative output port, a first hybrid quadrature coupler, a second hybrid quadrature coupler, a first inductor, a second inductor, a third inductor, a fourth inductor, a first variable capacitor, and a second variable capacitor, wherein the first variable capacitor comprises:
• a first comb structure and a first set of fingers, wherein the first comb structure comprises a first plurality of comb teeth, the first set of fingers comprises at least one first finger, the at least one first finger in the first set of fingers is disposed between at least two comb teeth of the first comb structure, and the at least one first finger in the first set of fingers has no electrical contact with the first plurality of comb teeth of the first comb structure;
• a second comb structure and a second set of fingers, wherein the second comb structure comprises a second plurality of comb teeth, the second set of fingers comprises at least one second finger, the at least one second finger in the second set of fingers is disposed between at least two comb teeth of the second comb structure, and the at least one second finger in the second set of fingers has no electrical contact with the second plurality of comb teeth of the second comb structure;
• and
• a first switch, configured to control whether there is electrical contact between the at least one first finger in the first set of fingers and the at least one second finger in the second set of fingers, wherein the first comb structure, the first set of fingers, the second comb structure, and the second set of fingers all comprise electrically conductive materials;
• wherein the second variable capacitor comprises:
• a third comb structure and a third set of fingers, wherein the third comb structure comprises a third plurality of comb teeth, the third set of fingers comprises at least one third finger, the at least one third finger in the third set of fingers is disposed between at least two comb teeth of the third comb structure, and the at least one third finger in the third set of fingers has no electrical contact with the third plurality of comb teeth of the third comb structure;
• a fourth comb structure and a fourth set of fingers, wherein the fourth comb structure comprises a fourth plurality of comb teeth, the fourth set of fingers comprises at least one fourth finger, the at least one fourth finger in the fourth set of fingers is disposed between at least two comb teeth of the fourth comb structure, and the at least one fourth finger in the fourth set of fingers has no electrical contact with the fourth plurality of comb teeth of the fourth comb structure;
• and
• a second switch, configured to control whether there is electrical contact between the at least one third finger in the first set of fingers and the at least one fourth finger in the fourth set of fingers, wherein the third comb structure, the third set of fingers, the fourth comb structure, and the fourth set of fingers all comprise electrically conductive materials;
• wherein the positive input port is connected to an input port of the first hybrid quadrature coupler, the positive output port is connected to an isolated port of the first hybrid quadrature coupler, a coupled port of the first hybrid quadrature coupler is connected to a first connection terminal of the first variable capacitor via the first inductor, and a through port of the first hybrid quadrature coupler is connected to a first connection terminal of the second variable capacitor via the second inductor;
• and
• wherein the negative input port is connected to an input port of the second hybrid quadrature coupler, the negative output port is connected to an isolated port of the second hybrid quadrature coupler, a coupled port of the second hybrid quadrature coupler is connected to a second connection terminal of the first variable capacitor via the third inductor, and a through port of the second hybrid quadrature coupler is connected to a second connection terminal of the second variable capacitor via the fourth inductor.

A semiconductor device, comprising a variable capacitor, the variable capacitor comprising:

• a first comb structure and a first set of fingers, wherein the first comb structure comprises a first plurality of comb teeth, the first set of fingers comprises at least one first finger, the at least one first finger in the first set of fingers is disposed between at least two comb teeth of the first comb structure, and the at least one first finger in the first set of fingers has no electrical contact with the first plurality of comb teeth of the first comb structure;
• a second comb structure and a second set of fingers, wherein the second comb structure comprises a second plurality of comb teeth, the second set of fingers comprises at least one second finger, the at least one second finger in the second set of fingers is disposed between at least two comb teeth of the second comb structure, and the at least one second finger in the second set of fingers has no electrical contact with the second plurality of comb teeth of the second comb structure;
• and
• a switch, configured to control whether there is electrical contact between the at least one first finger in the first set of fingers and the at least one second finger in the second set of fingers, wherein the first comb structure, the first set of fingers, the second comb structure, and the second set of fingers all comprise electrically conductive materials.