Systems and methods of clamp compensation
AssigneeFEI Company
InventorsEdwin Verschueren, Paul Tacx
Life of this patent
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AssigneeFEI Company
InventorsEdwin Verschueren, Paul Tacx
Estimating the term…
A method of producing a compensation signal to compensate for misalignment of a drive unit clamp element can include applying a clamp element drive signal to a drive unit clamp element to engage a mover element, determining a first displacement of the mover element, and determining a first compensation signal based at least in part on the first displacement. The method can further comprise applying the first compensation signal to the drive unit shear elements and the clamp element drive signal to the drive unit clamp element and determining a second displacement of the mover element. If the second displacement is less than a preselected threshold, the first compensation signal can be combined with an initial shear element drive signal to produce a modified shear element drive signal. If the second displacement is greater than the preselected threshold, a second compensation signal can be determined.
A method, comprising:
A method, comprising:
Dependencies are inferred from the claim text.