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US 12,055,810 B2Granted
Enhanced defect detection with planar macrocycle dyes in liquid-crystal films
AssigneeOrbotech Ltd.
InventorsKarla G. Gutierrez Cuevas, Jason Reid, Nungavaram Viswanathan
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Abstract
A modulator material layer includes a polymer matrix formed of a plurality of cross-linked polymer molecules and a plurality of droplets of liquid crystals within the polymer matrix. A planar macrocycle dye is dispersed within the plurality of droplets of liquid crystals. The planar macrocycle dye can include one or more of a phthalocanine, a porphyrin, a naphthalocyanine, a metallophthalocyanine, a metalloporphyrin, or a metallonaphthalocyanine.
Claims20
A modulator material layer comprising:
- a polymer matrix formed of a plurality of cross-linked polymer molecules;
- a plurality of droplets of liquid crystals within the polymer matrix;
- and
- a planar macrocycle dye dispersed within the plurality of droplets of liquid crystals.
1 more element
An imaging system comprising:
- an illumination source configured to generate illumination;
- a stage configured to hold a sample;
- a detector to generate an image of at least a portion of the sample;
- and
- an electro-optic modulator disposed in a path of illumination from the illumination source and separated from the sample by an air gap, wherein the electro-optic modulator includes:
- a transparent conductive film;
- a modulator material layer disposed on the transparent conductive film, the modulator material layer including:
- a polymer matrix formed of a plurality of cross-linked polymer molecules;
- a plurality of droplets of liquid crystals within the polymer matrix;
- and
- a planar macrocycle dye dispersed within the plurality of droplets of liquid crystals.
8 more elements
A method comprising:
- obtaining an emulsion by mixing water, liquid crystals, a planar macrocycle dye, and a plurality of hydrophilic polymer molecules;
- coating the emulsion onto a substrate;
- and
- drying the emulsion, wherein the emulsion forms a modulator material layer including:
- a polymer matrix formed of a plurality of cross-linked polymer molecules;
- a plurality of droplets of the liquid crystals within the polymer matrix;
- and
- the planar macrocycle dye dispersed within the plurality of droplets of liquid crystals, wherein the planar macrocycle dye includes one or more of a phthalocanine, a porphyrin, a naphthalocyanine, a metallophthalocyanine, a metalloporphyrin, or a metallonaphthalocyanine.
5 more elements
Dependencies are inferred from the claim text.