Automated system for online detection of organic molecular impurities in semiconductor grade chemicals

An analysis system, comprising:

• an initial multi-port valve configured to receive a sample;
• at least one intermediate multi-port valve fluidly connected to the initial multi-port valve and configured to receive the sample from the initial multi-port valve, a given intermediate multi-port valve having an ion-exchange column associated therewith, the given intermediate multi-port valve configured selectably to one of direct the sample through the ion-exchange column associated therewith or bypass the ion-exchange column, the sample directed through a chosen ion-exchange column as part of a speciation mode of operation to remove a matrix material from the sample, the sample directed to bypass any ion-exchange column as part of an infusion mode of operation;
• a further multi-port valve fluidly connected with the at least one intermediate multi-port valve and configured to receive the sample from the at least one intermediate multi-port valve;
• a time-of-flight mass spectrometer (TOF-MS) fluidly connected to the further multi-port valve;
• and
• one or more transfer lines, a given transfer line used for testing for one or more metal components being made of a fluoropolymer tubing, a given transfer line used for testing for one or more organic components being made of PEEK (polyetheretherketone) or fused silica tubing.

An analysis system, comprising:

• an initial multi-port valve configured to receive a sample;
• at least one intermediate multi-port valve fluidly connected to the initial multi-port valve and configured to receive the sample from the initial multi-port valve, a given intermediate multi-port valve having an ion-exchange column associated therewith, the given intermediate multi-port valve configured selectably to one of direct the sample through the ion-exchange column associated therewith or bypass the ion-exchange column, the sample directed through a chosen ion-exchange column as part of a speciation mode of operation to remove a matrix material from the sample, the sample directed to bypass any ion-exchange column as part of an infusion mode of operation;
• a further multi-port valve fluidly connected with the at least one intermediate multi-port valve and configured to receive the sample from the at least one intermediate multi-port valve;
• a time-of-flight mass spectrometer (TOF-MS) fluidly connected to the further multi-port valve;
• and
• a software configured to perform a semi-quantitative test for previously unknown components using a high-resolution mass to charge ratio (m/z).

An analysis system, comprising:

• an initial multi-port valve configured to receive a sample;
• at least one intermediate multi-port valve fluidly connected to the initial multi-port valve and configured to receive the sample from the initial multi-port valve, a given intermediate multi-port valve having an ion-exchange column associated therewith, the given intermediate multi-port valve configured selectably to one of direct the sample through the ion-exchange column associated therewith or bypass the ion-exchange column, the sample directed through a chosen ion-exchange column as part of a speciation mode of operation to remove a matrix material from the sample, the sample directed to bypass any ion-exchange column as part of an infusion mode of operation;
• a further multi-port valve fluidly connected with the at least one intermediate multi-port valve and configured to receive the sample from the at least one intermediate multi-port valve;
• a time-of-flight mass spectrometer (TOF-MS) fluidly connected to the further multi-port valve;
• and
• a software configured to account for a polarity of a given component.

An analysis system, comprising:

• an initial multi-port valve configured to receive a sample;
• at least one intermediate multi-port valve fluidly connected to the initial multi-port valve and configured to receive the sample from the initial multi-port valve, a given intermediate multi-port valve having an ion-exchange column associated therewith, the given intermediate multi-port valve configured selectably to one of direct the sample through the ion-exchange column associated therewith or bypass the ion-exchange column, the sample directed through a chosen ion-exchange column as part of a speciation mode of operation to remove a matrix material from the sample, the sample directed to bypass any ion-exchange column as part of an infusion mode of operation;
• a further multi-port valve fluidly connected with the at least one intermediate multi-port valve and configured to receive the sample from the at least one intermediate multi-port valve;
• a time-of-flight mass spectrometer (TOF-MS) fluidly connected to the further multi-port valve;
• and a software configured to add any newly observed component to a database.

An analysis system, comprising:

• an initial multi-port valve configured to receive a sample;
• at least one intermediate multi-port valve fluidly connected to the initial multi-port valve and configured to receive the sample from the initial multi-port valve, a given intermediate multi-port valve having an ion-exchange column associated therewith, the given intermediate multi-port valve configured selectably to one of direct the sample through the ion-exchange column associated therewith or bypass the ion-exchange column, the sample directed through a chosen ion-exchange column as part of a speciation mode of operation to remove a matrix material from the sample, the sample directed to bypass any ion-exchange column as part of an infusion mode of operation;
• a further multi-port valve fluidly connected with the at least one intermediate multi-port valve and configured to receive the sample from the at least one intermediate multi-port valve;
• a time-of-flight mass spectrometer (TOF-MS) fluidly connected to the further multi-port valve, wherein the TOF-MS is configured to use one nebulizer for both mass correction and sample introduction.

An analysis system, comprising:

• an initial multi-port valve configured to receive a sample;
• at least one intermediate multi-port valve fluidly connected to the initial multi-port valve and configured to receive the sample from the initial multi-port valve, a given intermediate multi-port valve having an ion-exchange column associated therewith, the given intermediate multi-port valve configured selectably to one of direct the sample through the ion-exchange column associated therewith or bypass the ion-exchange column, the sample directed through a chosen ion-exchange column as part of a speciation mode of operation to remove a matrix material from the sample, the sample directed to bypass any ion-exchange column as part of an infusion mode of operation;
• a further multi-port valve fluidly connected with the at least one intermediate multi-port valve and configured to receive the sample from the at least one intermediate multi-port valve;
• a time-of-flight mass spectrometer (TOF-MS) fluidly connected to the further multi-port valve, wherein the TOF-MS employs a platinum nebulizer.