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US 12,055,528 B2Granted
Micro-separator having stationary phase with three dimensional nano-structure and method for manufacturing the same
AssigneeKorea Advanced Institute of Science and Technology
InventorsSeokwoo Jeon, Youngsuk Shim, Donghwi Cho, Jade Nadine Ang
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Abstract
A disclosed micro-separator for gas chromatography includes a base substrate having a trench, a channel column disposed in the trench, and a cover member combined with the base substrate and covering the channel column. The channel column includes a stationary phase having pores ordered and three-dimensionally connected to each other.
Claims5
A method for manufacturing a micro-separator for gas chromatography, the method comprising:
- forming a photosensitive film in a trench of a base substrate;
- providing a three-dimensionally distributed light by using a phase mask to expose the photosensitive film to a light;
- and
- developing the light-exposed photosensitive film to form a polymeric stationary phase of a three-dimensional nano-structure having pores ordered and connected to each other,
- wherein the phase mask is disposed on a lower surface of the base substrate.
2 more elements
A method for manufacturing a micro-separator for gas chromatography, the method comprising:
- forming a photosensitive film in a trench of a base substrate;
- providing a three-dimensionally distributed light by using a phase mask to expose the photosensitive film to a light;
- developing the light-exposed photosensitive film to form a polymeric stationary phase of a three-dimensional nano-structure having pores ordered and connected to each other,
- forming a substituted stationary phase filling at least a portion of the pores of the polymeric stationary phase and including a metal or a ceramic;
- and
- removing the polymeric stationary phase,
- wherein an optical medium member is provided on the photosensitive film, and the phase mask is disposed on the optical medium member.
4 more elements
Dependencies are inferred from the claim text.