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US 12,055,438 B2Granted
Sensor and method using bi-stable digitizing micromechanical switches for analog measurement of input signals
AssigneeNortheastern University
InventorsMatteo Rinaldi, Vageeswar Rajaram, Zhenyun Qian, Sungho (Ryan) Kang, Sila Deniz Calisgan, Antea Risso
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Abstract
Ultra-low power methods and sensor devices are provided for determining the presence and magnitude of electromagnetic radiation or other signals. The sensor devices and methods provide both qualitative and quantitative analyses and can be deployed in remote locations for continuous monitoring over years without requiring a replacement power supply.
Claims20
An ultra-low power sensor device capable of detecting a signal and measuring a magnitude of the detected signal, the device comprising
- a micromechanical switch comprising a sensor element and two contact elements, wherein the switch is configured to close a gap between the contact elements in response to a signal received by the sensor element;
- a microcontroller comprising a sensing circuit and a battery, the microcontroller configured to apply a voltage bias sweep across the contact elements in response to a signal detected by the sensing element, wherein said voltage bias sweep determines a pull-in voltage that closes the gap between the contacts, and wherein the pull-in voltage provides a measure of the magnitude of the detected signal.
An ultralow power sensor device comprising:
- a substrate with a first electrical contact disposed on the substrate;
- a movable component attached at one end to the substrate;
- the component comprising a second electrical contact disposed at an opposite end of the component;
- the component operative to move in a proportion to a response to an input signal;
- wherein position of the second contact relative to the first contact determines whether the switch is in an ON or OFF state;
- a power supply with a circuit and a voltage applied between the first contact and the second contact;
- wherein application of the voltage causes the second contact to move toward the first contact in a proportion to the applied voltage;
- wherein the input signal comprises a signal derived from the group consisting of a vibration, a physical movement, a temperature change, electromagnetic radiation within a spectral band, a mechanical or electrical shock, a wind or a pressure change, a chemical or biomolecule, a sound, a change in a physical state, and a change in an environmental condition.
5 more elements
Dependencies are inferred from the claim text.