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US 12,055,193 B2Granted
Vibration isolation systems with reaction masses and actuators
AssigneeNikon Corporation
InventorsAlton Hugh Phillips, Michael Birk Binnard, Yoon Jung Jeong, Matthew Parker-McCormick Bjork
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Abstract
Apparatus include a reaction mass and an actuator coupled to the reaction mass. The actuator is configured to couple to a payload and to move the reaction mass in response to a movement error of the payload to reduce the movement error of the payload. Robotic systems using actuated reaction masses, as well as related methods of reducing movement errors, are also disclosed.
Claims21
An apparatus, comprising:
- a robot arm;
- a processing unit coupled to the robot arm and movable by the robot arm;
- a reaction mass;
- and
- an actuator that is coupled to the reaction mass,
- wherein the actuator is configured to couple to the processing unit and to move the reaction mass in response to a movement error of the processing unit to reduce the movement error of the processing unit.
3 more elements
A method, comprising:
- providing an actuator coupled to a reaction mass;
- using the actuator to couple to a processing unit that is coupled to and movable by a robot arm;
- and
- in response to a movement error of the processing unit, moving the reaction mass with the actuator coupled to the processing unit to reduce the movement error of the processing unit.
1 more element
A robotic system, comprising:
- a base;
- a robot arm coupled to the base;
- a processing unit coupled to the robot arm and movable by the robot arm;
- and
- an apparatus comprising a reaction mass and an actuator configured to generate a force,
- wherein the reaction mass is movable at least in part by the force generated by the actuator to reduce a positioning error of the processing unit, and
- wherein the actuator is coupled to the processing unit.
4 more elements
Dependencies are inferred from the claim text.