Hydrogen peroxide decomposition inhibitor
AssigneeKanto Kagaku Kabushiki Kaisha
InventorsHideki Takahashi, Erina Ogihara, Pen-Nan Liao, Po-Heng Wu, Yi Li
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Abstract
The present invention addresses the problem of providing a decomposition inhibitor for inhibiting the decomposition of hydrogen peroxide included in an etching liquid composition for titanium nitride. The present invention relates to a decomposition inhibitor that is used to inhibit the decomposition of hydrogen peroxide included in an etching liquid composition for titanium nitride and that includes at least one compound selected from among azole compounds, aminocarboxylic acid compounds, and phosphonic acid compounds as an active component.
Claims4
A method for inhibiting the decomposition of hydrogen peroxide contained in an etching liquid composition for titanium nitride, which comprises adding a decomposition inhibitor to the etching liquid composition for titanium nitride which contains hydrogen peroxide, wherein the decomposition inhibitor comprises azole compounds as an active component, and wherein the decomposition inhibitor is added to the etching liquid composition so that azole compounds are comprised at a ratio from 2 mmol/L to 10 mmol/L relative to 100 ppm of titanium nitride in the etching liquid composition.
Dependencies are inferred from the claim text.