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US 12,052,921 B2Granted
Method for manufacturing a film on a flexible sheet
AssigneeSoitec
InventorsBruno Ghyselen, Jean-Marc Bethoux
Life of this patent
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Abstract
A method for manufacturing a film, notably monocrystalline, on a flexible sheet, comprises the following steps: providing a donor substrate, forming an embrittlement zone in the donor substrate so as to delimit the film, forming the flexible sheet by deposition over the surface of the film, and detaching the donor substrate along the embrittlement zone so as to transfer the film onto the flexible sheet.
Claims22
A structure for a microelectronic, photonic, or optical device, comprising:
- a thin monocrystalline film having a thickness between 100 nm and 10 μm;
- and
- a thin flexible sheet deposited on a surface of the thin monocrystalline film, the thin flexible sheet having a thickness between 1 and 50 μm, wherein the thin flexible sheet mechanically supports the thin monocrystalline film.
Dependencies are inferred from the claim text.