Contaminant collection on SOI
AssigneeTexas Instruments Incorporated
InventorsHonglin Guo, Frank John Sweeney
Life of this patent
Estimating the term…
Abstract
An integrated circuit includes an SOI substrate having a semiconductor layer over a buried insulator layer. An electronic device has an NWELL region in the semiconductor layer, a dielectric over the NWELL region, and a polysilicon plate over the dielectric. A white space region adjacent the electronic device includes a first P-type region in the semiconductor layer and adjacent the surface. The P-type region has a first sheet resistance and the NWELL region has a second sheet resistance that is greater than the first sheet resistance.
Claims21
A method of fabricating an integrated circuit, the method comprising:
- forming a first P-type region in a semiconductor layer of a semiconductor-on-insulator (SOI) substrate, the first P-type region adjacent a surface of the semiconductor layer and having a first sheet resistance;
- forming an N-type well (NWELL) region in the semiconductor layer, the NWELL region adjacent the surface of the semiconductor layer and having at least one side that is adjacent the first P-type region, the NWELL region having a second sheet resistance that is greater than the first sheet resistance;
- forming a dielectric over the NWELL region;
- and
- forming a polysilicon plate over the dielectric.
A method, comprising:
- forming a P-type well (PWELL) region in a semiconductor layer on an insulator layer, the PWELL region extended from a surface of the semiconductor layer and having a first sheet resistance;
- forming an N-type well (NWELL) region in the semiconductor layer, the NWELL region extended from the surface of the semiconductor layer and having a second sheet resistance greater than the first resistance, wherein the NWELL region having at least one side adjacent the PWELL region;
- forming a dielectric layer over the NWELL region;
- and
- forming a conductive plate on the dielectric layer.
Dependencies are inferred from the claim text.