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US 12,044,963 B2Granted
High refractive index imprint compositions and materials and processes for making the same
AssigneeApplied Materials, Inc.
InventorsAmita Joshi, Ian Matthew McMackin, Rami Hourani, Yingdong Luo, Sivapackia Ganapathiappan, Ludovic Godet
Life of this patent
Estimating the term…
Abstract
Embodiments of the present disclosure generally relate to imprint compositions and materials and related processes useful for nanoimprint lithography (NIL). In one or more embodiments, an imprint composition contains one or more types of nanoparticles, one or more surface ligands, one or more solvents, one or more additives, and one or more acrylates.
Claims20
An imprint composition, comprising:
- nanoparticles, wherein each nanoparticle comprises a core and a shell, and wherein the core comprises metal oxide and the shell comprises silicon oxide;
- one or more solvents;
- a surface ligand, wherein the surface ligand comprises oleic acid, stearic acid, propionic acid, benzoic acid, palmitic acid, myristic acid, methylamine, oleylamine, butylamine, or any combination thereof, and wherein the surface ligand is at a concentration of about 6 weight percent (wt %) to about 50 wt %, based on the weight of the nanoparticles;
- and
- an additive, wherein the additive comprises fluorosurfactant, fluorocarbon, glycolic acid ethoxylate oleyl ether, or any combination thereof, and wherein the additive is at a concentration of about 0.01 wt % to about 3 wt %, based on the weight of the nanoparticles;
- and
- an acrylate;
- wherein the imprint composition has a viscosity of 5 cP to about 50 cP, as measured at a temperature of 23° C.
5 more elements
An imprint composition, comprising:
- about 0.5 wt % to about 40 wt % of nanoparticles, wherein each nanoparticle comprises a core and a shell, and wherein the core comprises metal oxide and the shell comprises silicon oxide;
- about 50 wt % to about 90 wt % of a solvent;
- about 5 wt % to about 40 wt % of a surface ligand, based on the weight of the nanoparticles, the surface ligand comprising oleic acid, stearic acid, propionic acid, benzoic acid, palmitic acid, myristic acid, methylamine, oleylamine, butylamine, or any combination thereof;
- about 0.01 wt % to about 5 wt % of an additive, based on the weight of the nanoparticles, the additive comprising fluorosurfactant, fluorocarbon, glycolic acid ethoxylate oleyl ether, or any combination thereof;
- and
- about 0.1 wt % to about 10 wt % of an acrylate, based on the weight of the nanoparticles;
- wherein the imprint composition has a viscosity of 5 cP to about 50 cP, as measured at a temperature of 23° C.
4 more elements
An imprint composition, comprising:
- nanoparticles, wherein each nanoparticle comprises a core and a shell, and wherein the core comprises metal oxide and the shell comprises silicon oxide;
- one or more solvents;
- a surface ligand, wherein the surface ligand comprises benzyl alcohol, oleyl alcohol, butanol, octanol, dodecanol, octyltrimethoxy silane, octyltriethoxy silane, octenyltrimethoxy silane, octenyltriethoxy silane, 3-(trimethoxysilyl)propyl methacrylate, propyltriethoxy silane, salts thereof, esters thereof, complexes thereof, or any combination thereof, and wherein the surface ligand is at a concentration of about 6 wt % to about 50 wt %, based on the weight of the nanoparticles;
- an additive, wherein the additive comprises one or more of fluorosurfactant, fluorocarbon, glycolic acid ethoxylate oleyl ether, or any combination thereof;
- and
- an acrylate;
- wherein the imprint composition has a viscosity of 5 cP to about 50 cP.
4 more elements
Dependencies are inferred from the claim text.