Overhanging device structures and related methods of manufacture

An overhanging device cavity structure, comprising:

• a substrate having a substrate surface;
• a cavity formed in the substrate partially beneath the substrate surface and comprising cavity walls extending from the substrate surface, the cavity walls comprising a first cavity side wall and a second cavity side wall opposing the first cavity side wall;
• a support extending from the first cavity side wall to the second cavity side wall, the support in direct contact with the first cavity side wall, in direct contact with the second cavity side wall, and at least partially dividing the cavity;
• and
• a device disposed on and in direct contact with the support and extending from the support into the cavity, the device comprising a material different from a material of the substrate, different from a material of the first cavity side wall, and different from a material of the second cavity side wall,
• wherein the first cavity side wall and the second cavity side wall each comprise a patterned dielectric material deposited on the substrate surface.

An overhanging device cavity structure, comprising:

• a substrate having a substrate surface;
• a cavity comprising cavity walls disposed on and extending from the substrate surface, the cavity walls comprising a first cavity side wall and a second cavity side wall opposing the first cavity side wall;
• a support extending from the first cavity side wall to the second cavity side wall, the support at least partially dividing the cavity;
• and
• a device disposed on the support and extending from the support into the cavity,
• wherein the first cavity side wall and the second cavity side wall each comprise a patterned dielectric material deposited on the substrate surface,
• wherein the device is in direct contact with the support.