Glass substrate and method for manufacturing glass substrate
AssigneeAGC Inc.
InventorsYuha Kobayashi, Kenji Goto
Life of this patent
Estimating the term…
Loading patent…
AssigneeAGC Inc.
InventorsYuha Kobayashi, Kenji Goto
Estimating the term…
To appropriately manufacture a semiconductor device. A glass substrate is a glass substrate for manufacturing the semiconductor device. In a case in which one surface is directed downward in a vertical direction, and a first position, a second position, and a third position on the one surface on an outer side in a radial direction with respect to a center point of the glass substrate are supported by supporting members, a lowest point as a position where a height in the vertical direction is the lowest on other surface is positioned in a circular central region on an inner side in the radial direction with respect to the first position, the second position, and the third position when viewed from the vertical direction, a center of the central region is a center point of the glass substrate, and a diameter of the central region has a length of ⅓ of a diameter of the glass substrate.
A glass substrate for manufacturing a semiconductor device, wherein, in a case in which one surface is directed downward in a vertical direction and a first position, a second position, and a third position on the one surface on an outer side in a radial direction with respect to a center point of the glass substrate are supported by supporting members, a lowest point as a position where a height in the vertical direction is the lowest on other surface is positioned in a circular central region on an inner side in the radial direction with respect to the first position, the second position, and the third position when viewed from the vertical direction, a center of the central region is a center point of the glass substrate, and a diameter of the central region has a length of ⅓ of a diameter of the glass substrate, wherein,
A glass substrate for manufacturing a semiconductor device, wherein, in a case in which one surface is directed downward in a vertical direction and a first position, a second position, and a third position on the one surface on an outer side in a radial direction with respect to a center point of the glass substrate are supported by supporting members, a lowest point as a position where a height in the vertical direction is the lowest on other surface is positioned in a circular central region on an inner side in the radial direction with respect to the first position, the second position, and the third position when viewed from the vertical direction, a center of the central region is a center point of the glass substrate, and a diameter of the central region has a length of ⅓ of a diameter of the glass substrate, wherein,
Dependencies are inferred from the claim text.