Electrostatic chuck heater and manufacturing method therefor
AssigneeMiCo Ceramics Ltd.
InventorsChul Ho Jung, Jin Young Choi
Life of this patent
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Abstract
The present invention relates to an electrostatic chuck heater and a manufacturing method therefor and, more particularly, to an electrostatic chuck heater comprising: a ground electrode; and an electrostatic chuck electrode spaced a predetermined distance apart from the outside of the ground electrode, wherein the heater can reduce the phenomenon of rising of a wafer edge and thus can significantly reduce the temperature deviation according to positions on a heating surface of an object, such as a wafer, so as to increase the temperature uniformity of the heating surface.
Claims19
An electrostatic chuck heater comprising:
- a ceramic plate including a ground electrode;
- and
- an electrostatic chuck electrode spaced a predetermined distance apart from an outer side of the ground electrode,
- wherein an electrostatic chuck electrode connecting member is connected to the electrostatic chuck electrode, and is embedded in the ceramic plate,
- wherein the electrostatic chuck electrode connecting member is positioned on a first plane that is different from and parallel to a second plane on which the electrostatic chuck electrode is positioned.
A method of manufacturing an electrostatic chuck heater, the method comprising:
- forming a ceramic powder layer structure in which a ceramic molded body, in which a ground electrode and an electrostatic chuck electrode are embedded, is interposed between a first ceramic powder layer and a second ceramic powder layer;
- and
- sintering the ceramic powder layer structure,
- wherein the electrostatic chuck electrode is spaced a predetermined distance apart from an outer side of the ground electrode.
An electrostatic chuck heater comprising:
- a ground electrode;
- an electrostatic chuck electrode spaced a predetermined distance apart from an outer side of the ground electrode;
- and
- an electrostatic chuck connecting member for supplying electric power to the electrostatic chuck electrode,
- wherein a material of the electrostatic chuck connecting member is molybdenum (Mo).
Dependencies are inferred from the claim text.