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US 12,040,153 B2Granted
Ion gun
AssigneeUlvac, Inc.
InventorTakumi Yuze
Life of this patent
Estimating the term…
Abstract
An ion gun of the invention includes: an anode; a magnetic pole that has an inner surface facing the anode, a slit provided at a position corresponding to the anode, and an inner inclined surface that extends from an end of the inner surface to the slit and that forms a part of the slit; and a cover that covers at least the inner surface and the inner inclined surface, is formed of an electroconductive and non-magnetic material, and is detachable from the magnetic pole.
Claims8
An ion gun comprising:
- an anode;
- a magnetic pole that has an inner surface facing the anode, a slit provided at a position corresponding to the anode, and an inner inclined surface that extends from an end of the inner surface to the slit and that forms a part of the slit;
- and
- a cover that covers at least the inner surface and the inner inclined surface, is formed of an electroconductive and non-magnetic material, and is detachable from the magnetic pole.
1 more element
Dependencies are inferred from the claim text.