US 12,038,720 B2 · Arrangement and method for detecting a measured value on the basis of electron holography

Abstract

The invention relates to a method for detecting a measured value (dϕ/dx, M). According to the invention, provision is made for a sinusoidal excitation signal (Ue) with a predetermined excitation frequency (f), with or without a superposed DC component (Uoffset), to be fed to an input of a component (100, C), for at least one electron holography measuring step to be carried out, in which an electron beam (Se) is directed on the component (100, C), said electron-beam penetrating and/or passing the component (100, C) and subsequently being superposed with a reference electron-beam (Sr), and for an electrical hologram (EHG) arising by interference of the two electron beams (Se, Sr) during a predetermined measurement window (F) to be measured and the phase image (PB) to be ascertained therefrom, and for the measured value (M) to be formed on the basis of the phase image (PB), wherein the temporal length (Tf) of the measurement window (F) of the electron holography measuring step is shorter than half the period (T) of the sinusoidal excitation signal (Uc).

Claims20

Dependent claims

A method for recording a measurement value (dφ/dx, M), comprising the steps of:

feeding a sinusoidal excitation signal (Ue) having a predetermined excitation frequency (f), with or without a superimposed DC part (Uoffset), to an input of a component (100, C),
carrying out at least one electron holography measurement step, in which
an electron beam (Se) is directed onto the component (100, C), passes through the component (100, C) and is subsequently superimposed with a reference electron beam (Sr), and
an electron hologram (EHG) resulting from interference of the two electron beams (Se, Sr) during a predetermined measurement window (F) is measured, and a phase image (PB) is determined therefrom, and
wherein the measurement value (M) is formed with the aid of the phase image (PB),
wherein the temporal length (Tf) of the measurement window (F) of the electron holography measurement step is less than half the period duration (T) of the sinusoidal excitation signal (Ue).

3 more elements

An arrangement for recording a measurement value (M), comprising

a sine generator (10) configured to generate a sinusoidal excitation signal (Ue) having a predetermined excitation frequency (f), with or without a superimposed DC part (Uoffset), and wherein the singe generator is configured to feed the sinusoidal excitation signal into a component (100, C),
an electron holography measuring instrument (20) for carrying out an electron holography measurement step, in which
an electron beam (Se) is directed onto the component (100, C), passes through the component (100, C) and is subsequently superimposed with a reference electron beam (Sr), and
an electron hologram (EHG) resulting from interference of the two electron beams during a predetermined measurement window (F) is measured, and a phase image (PB) is determined therefrom,
an evaluation unit (40) for forming the measurement value with the aid of the phase image (PB), and
a measurement window control unit (80) for determining the location and length (Tf) of the measurement window (F), specifically in such a way that the temporal length (Tf) of the measurement window (F) of the electron holography measurement step is less than half the period duration (T) of the sinusoidal excitation signal (Ue).

3 more elements

Dependencies are inferred from the claim text.

Arrangement and method for detecting a measured value on the basis of electron holography

Life of this patent

Arrangement and method for detecting a measured value on the basis of electron holography

Life of this patent

Abstract

Claims20