Rotational flow generator, piping system, semiconductor manufacturing apparatus, and heat exchanger
AssigneeContamination Control Services
InventorToyohiko Shindo
Life of this patent
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Abstract
Provided are a rotational flow generator, a piping system, a semiconductor manufacturing apparatus, and a heat exchanger that enable the clogging of a pipe member to be more effectively prevented. A rotational flow generator 1 comprises a spray port 14a that can be attached to/removed from a pipe member 103 through which a first fluid flows, and that sprays a second fluid in a direction inclined with respect to the center axis line of the pipe member 103. A rotational flow generated by the rotational flow generator 1 can reduce the amount of accretion on an inner wall of the pipe member 103.
Claims9
A rotational flow generator, detachably attached to a pipe member through which a first fluid flows, the generator comprising:
- a circular plate extending into a flow path of the first fluid from an outer pipe of the generator, the circular plate having an outer diameter equal to the outer pipe;
- a jetting port disposed in the circular plate configured to jet a second fluid in a direction inclined with respect to a central axis of the pipe member;
- wherein the direction is inclined with respect to a straight line parallel to an axis of the rotational flow generator, and the jet of the second fluid intersects a tangent plane tangent to a cylinder around the axis;
- and
- wherein the direction is inclined so that the second fluid moves radially outward of a pipe located on a downstream side of a portion where the jetting port is provided as the second fluid moves toward a downstream side of a flow path for the first fluid.
Dependencies are inferred from the claim text.