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US 12,037,679 B2Granted
Method of forming a diamond film
AssigneeApplied Materials, Inc.
InventorsVicknesh Sahmuganathan, Jiteng Gu, Zhongxin Chen, Kian Ping Loh, John Sudijono, Haisen Xu, Sze Chieh Tan, Yuanxing Han, Jiecong Tang, Eswaranand Venkatasubramanian, Abhijit Basu Mallick
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Abstract
Apparatuses and methods for forming a film on a substrate are described. The film is formed on the substrate by depositing an adamantane monomer and an initiator on the substrate to form a polymerizable seed layer and curing the polymerizable seed layer to form a polyadamantane layer.
Claims17
A method of forming a film, the method comprising:
- depositing an adamantane monomer and an initiator on a substrate to form a polymerizable seed layer;
- curing the polymerizable seed layer to form a polyadamantane layer;
- removing an uncured portion of the polymerizable seed layer by heating the substrate at a temperature in a range of from 25° C. to 400° C. or chemically washing the substrate;
- and
- depositing a nano-crystalline diamond layer on the polyadamantane layer.
2 more elements
A method of forming a diamond film, the method comprising:
- thermally evaporating an adamantane monomer and an initiator onto a substrate to form a polymerizable seed layer, the initiator comprising one or more of a benzophenone, a thioxanthone, a benzoin ether, a benzyl ketal, a dialkoxyacetophenone, a hydroxyalkylphenone, an aminoalkylphenone, an acylphosphine oxide, and derivatives thereof, and the adamantane monomer having a structure selected from the group consisting of formula (I), (II), (III), and (IV),
- wherein R1, R2, R3 and R4 independently comprise one or more of hydrogen, a vinyl group, an acrylate group, a styrene group, an alkynyl group, a halide group, an epoxide group, an amine group, a carboxylic acid group, an ester group, and an alkyl group;
- exposing the polymerizable seed layer to a light source having a wavelength in a range of from 100 nm to 700 nm for a time period in a range of from 1 min to 2 hours to cure the polymerizable seed layer and form a polyadamantane layer on the substrate;
- removing an uncured portion of the polymerizable seed layer;
- and
- depositing a nano-crystalline diamond layer on the polyadamantane layer.
3 more elements
A method of forming a diamond film, the method comprising:
- dissolving an adamantane monomer in a first solvent to form a solution, the adamantane monomer having a structure selected from the group consisting of formula (I), (II), (III), and (IV)
- wherein R1, R2, R3 and R4 independently comprise one or more of hydrogen, a vinyl group, an acrylate group, a styrene group, an alkynyl group, a halide group, an epoxide group, an amine group, a carboxylic acid group, an ester group, and an alkyl group;
- adding an initiator to the solution to form a mixture, the initiator comprising one or more of a benzophenone, a thioxanthone, a benzoin ether, a benzyl ketal, a dialkoxyacetophenone, a hydroxyalkylphenone, an aminoalkylphenone, an acylphosphine oxide, and derivatives thereof;
- exposing the mixture to ultraviolet light to provide the polyadamantane polymer;
- dissolving the polyadamantane polymer in a second solvent to form a polymer solution;
- spin coating the polymer solution onto the substrate to coat the substrate with the polyadamantane polymer;
- and
- exposing the substrate coated with the polyadamantane polymer to a plasma to form a nano-crystalline diamond layer on the substrate.
5 more elements
Dependencies are inferred from the claim text.