Nano metal compound particles, coating material and film using the same, method for producing film, and method of producing nano metal compound particles
AssigneesKabushiki Keisha Toshiba, Toshiba Materials Co., Ltd.
InventorsYuzo Shigesato, Junjun Jia, Daisuke Fukushi, Hideaki Hirabayashi, Yoshinori Kataoka, Akito Sasaki, Atsuya Sasaki
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Abstract
According to one embodiment, nano metal compound particles are provided. The nano metal compound particles have an average particle size of 50 nm or less. The nano metal compound particles have a peak ωt of 2.8 eV or less. The peak ωt corresponds to a resonant frequency of an oscillator according to a spectroscopic ellipsometry method fitted to a Lorentz model.
Claims14
Nano metal compound particles having an average particle size of 50 nm or less, a maximum particle size of 100 nm or less, and a peak ωt of 2.8 eV or less, the peak cot corresponding to a resonant frequency of an oscillator according to a spectroscopic ellipsometry method for a batch of nano metal compound particles with a film thickness in a range of 50 nm to 200 nm fitted to a Lorentz model using a theoretical equation shown below:
- ε(ω)=ε∞+fωt2/ωt2+ω2+iγ0ε
- wherein ω denotes a frequency of incident light, ωt denotes the oscillator center of the oscillator, γ0 denotes a damping factor, f denotes an oscillator strength, ε(ω) denotes a permittivity function, ε∞ denotes a limit value of high-frequency permittivity function, and i is an imaginary number.
Dependencies are inferred from the claim text.