Micromechanical system, method for operating a micromechanical system
AssigneeRobert Bosch GmbH
InventorsLars Tebje, Johannes Classen, Christof Schwenk, Holger Rumpf, Joerg Braeuer, Torsten Ohms
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Abstract
A micromechanical system which includes a movably suspended mass. The micromechanical system includes a damping system, the damping system including a movably suspended damping structure, the damping structure being deflectable by applying a voltage. The damping structure is designed in such a way that a frequency response and/or a damping of the movably suspended mass are/is changeable with the aid of a deflection of the damping structure.
Claims15
A micromechanical system, comprising:
- a movably suspended mass;
- and
- a damping system including a movably suspended damping structure, the damping structure being deflectable by applying a voltage, the damping structure being configured in such a way that a frequency response of the movably suspended mass is changeable as a function of a deflection of the damping structure,
- wherein the micromechanical system includes a stopper device, the deflection of the damping structure being limitable as a function of the stopper device,
- wherein a targeted damping level, in which the stopper device and the damping structure come into contact, is settable by selecting a predefined distance between the stopper device and the damping structure.
A method for operating a micromechanical system, the micromechanical system including a movably suspended mass, and a damping system including a movably suspended damping structure, the damping structure being deflectable by applying a voltage, the damping structure being configured in such a way that a frequency response and/or a damping of the movably suspended mass is changeable as a function of a deflection of the damping structure, the method comprising:
- deflecting the damping structure by applying the voltage, the frequency response of the movably suspended mass being changed as a function of the deflection of the damping structure,
- wherein the micromechanical system includes a stopper device, the deflection of the damping structure being limitable as a function of the stopper device,
- wherein a targeted damping level, in which the stopper device and the damping structure come into contact, is settable by selecting a predefined distance between the stopper device and the damping structure.
Dependencies are inferred from the claim text.